Matches in SemOpenAlex for { <https://semopenalex.org/work/W2018404003> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2018404003 endingPage "157" @default.
- W2018404003 startingPage "155" @default.
- W2018404003 abstract "The effect of substrate orientation on tungsten silicide formation has been studied. It has been found that the silicide on Si(100) forms at low temperature, has fine grained surface morphology and has low sheet resistance as compared with that formed on Si(111). We attribute this to the difference in microstructure of the films, due mainly to the difference in the nucleation process for the two substrates." @default.
- W2018404003 created "2016-06-24" @default.
- W2018404003 creator A5008232817 @default.
- W2018404003 creator A5043992754 @default.
- W2018404003 creator A5049366030 @default.
- W2018404003 date "1994-01-01" @default.
- W2018404003 modified "2023-09-26" @default.
- W2018404003 title "The effect of substrate orientation on WSi2 formation" @default.
- W2018404003 cites W1975216451 @default.
- W2018404003 cites W1976659232 @default.
- W2018404003 cites W2042970157 @default.
- W2018404003 cites W2047718136 @default.
- W2018404003 cites W2079601697 @default.
- W2018404003 cites W2087090240 @default.
- W2018404003 cites W2122759562 @default.
- W2018404003 doi "https://doi.org/10.1016/0040-6090(94)90666-1" @default.
- W2018404003 hasPublicationYear "1994" @default.
- W2018404003 type Work @default.
- W2018404003 sameAs 2018404003 @default.
- W2018404003 citedByCount "2" @default.
- W2018404003 countsByYear W20184040032012 @default.
- W2018404003 crossrefType "journal-article" @default.
- W2018404003 hasAuthorship W2018404003A5008232817 @default.
- W2018404003 hasAuthorship W2018404003A5043992754 @default.
- W2018404003 hasAuthorship W2018404003A5049366030 @default.
- W2018404003 hasConcept C111368507 @default.
- W2018404003 hasConcept C127313418 @default.
- W2018404003 hasConcept C127413603 @default.
- W2018404003 hasConcept C151730666 @default.
- W2018404003 hasConcept C171250308 @default.
- W2018404003 hasConcept C178790620 @default.
- W2018404003 hasConcept C185592680 @default.
- W2018404003 hasConcept C191897082 @default.
- W2018404003 hasConcept C192562407 @default.
- W2018404003 hasConcept C2777289219 @default.
- W2018404003 hasConcept C2779227376 @default.
- W2018404003 hasConcept C2780901251 @default.
- W2018404003 hasConcept C42360764 @default.
- W2018404003 hasConcept C499950583 @default.
- W2018404003 hasConcept C542268612 @default.
- W2018404003 hasConcept C544956773 @default.
- W2018404003 hasConcept C61048295 @default.
- W2018404003 hasConcept C66825105 @default.
- W2018404003 hasConcept C8010536 @default.
- W2018404003 hasConcept C87976508 @default.
- W2018404003 hasConceptScore W2018404003C111368507 @default.
- W2018404003 hasConceptScore W2018404003C127313418 @default.
- W2018404003 hasConceptScore W2018404003C127413603 @default.
- W2018404003 hasConceptScore W2018404003C151730666 @default.
- W2018404003 hasConceptScore W2018404003C171250308 @default.
- W2018404003 hasConceptScore W2018404003C178790620 @default.
- W2018404003 hasConceptScore W2018404003C185592680 @default.
- W2018404003 hasConceptScore W2018404003C191897082 @default.
- W2018404003 hasConceptScore W2018404003C192562407 @default.
- W2018404003 hasConceptScore W2018404003C2777289219 @default.
- W2018404003 hasConceptScore W2018404003C2779227376 @default.
- W2018404003 hasConceptScore W2018404003C2780901251 @default.
- W2018404003 hasConceptScore W2018404003C42360764 @default.
- W2018404003 hasConceptScore W2018404003C499950583 @default.
- W2018404003 hasConceptScore W2018404003C542268612 @default.
- W2018404003 hasConceptScore W2018404003C544956773 @default.
- W2018404003 hasConceptScore W2018404003C61048295 @default.
- W2018404003 hasConceptScore W2018404003C66825105 @default.
- W2018404003 hasConceptScore W2018404003C8010536 @default.
- W2018404003 hasConceptScore W2018404003C87976508 @default.
- W2018404003 hasIssue "1" @default.
- W2018404003 hasLocation W20184040031 @default.
- W2018404003 hasOpenAccess W2018404003 @default.
- W2018404003 hasPrimaryLocation W20184040031 @default.
- W2018404003 hasRelatedWork W150843855 @default.
- W2018404003 hasRelatedWork W1990465244 @default.
- W2018404003 hasRelatedWork W2011794728 @default.
- W2018404003 hasRelatedWork W2020660716 @default.
- W2018404003 hasRelatedWork W2076492305 @default.
- W2018404003 hasRelatedWork W2122759562 @default.
- W2018404003 hasRelatedWork W2384572718 @default.
- W2018404003 hasRelatedWork W2900482268 @default.
- W2018404003 hasRelatedWork W3157307459 @default.
- W2018404003 hasRelatedWork W4285795498 @default.
- W2018404003 hasVolume "238" @default.
- W2018404003 isParatext "false" @default.
- W2018404003 isRetracted "false" @default.
- W2018404003 magId "2018404003" @default.
- W2018404003 workType "article" @default.