Matches in SemOpenAlex for { <https://semopenalex.org/work/W2018429498> ?p ?o ?g. }
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- W2018429498 endingPage "36" @default.
- W2018429498 startingPage "32" @default.
- W2018429498 abstract "3C-SiC has been heteroepitaxially grown by low-pressure chemical vapor deposition (CVD) on the molecular beam epitaxy (MBE) 3C-SiC layer which has been grown on miscut Si(001) substrates inclined in the [110] direction. The reflection high-energy electron diffraction (RHEED) patterns obtained from the 3C-SiC film grown by CVD directly on the miscut Si(001)-4°[110] substrate without MBE layers show 3×2+90°-rotated 2×3 structure which provides evidence of the existence of anti-phase boundaries. However, the RHEED patterns obtained from the 3C-SiC film grown by CVD on the surface-structure-controlled MBE layer on the miscut Si(001)-4°[110] substrate show single-phase 3×2 structure. Surface morphology of 3C-SiC(001) grown by CVD on the MBE layer is dependent on the miscut direction of the Si substrates. The preferential [110] growth direction on 3C-SiC(001) plays an important role in forming the single-phase growth and the surface morphologies. The 3C-SiC films grown by CVD/MBE exhibit little strain, while the 3C-SiC film grown by CVD exhibits tensile strain." @default.
- W2018429498 created "2016-06-24" @default.
- W2018429498 creator A5065370677 @default.
- W2018429498 creator A5091757136 @default.
- W2018429498 date "1998-11-01" @default.
- W2018429498 modified "2023-10-14" @default.
- W2018429498 title "Epitaxial growth of 3C-SiC by low-pressure chemical vapor deposition on a surface-structure-controlled molecular beam epitaxy layer" @default.
- W2018429498 cites W104127606 @default.
- W2018429498 cites W1965166622 @default.
- W2018429498 cites W1971938877 @default.
- W2018429498 cites W2008924171 @default.
- W2018429498 cites W2009328943 @default.
- W2018429498 cites W2013021721 @default.
- W2018429498 cites W2015229488 @default.
- W2018429498 cites W2026811375 @default.
- W2018429498 cites W2085730609 @default.
- W2018429498 cites W2119523289 @default.
- W2018429498 cites W2125693132 @default.
- W2018429498 cites W2160286674 @default.
- W2018429498 doi "https://doi.org/10.1016/s0040-6090(98)00870-0" @default.
- W2018429498 hasPublicationYear "1998" @default.
- W2018429498 type Work @default.
- W2018429498 sameAs 2018429498 @default.
- W2018429498 citedByCount "15" @default.
- W2018429498 countsByYear W20184294982012 @default.
- W2018429498 countsByYear W20184294982013 @default.
- W2018429498 countsByYear W20184294982016 @default.
- W2018429498 countsByYear W20184294982018 @default.
- W2018429498 countsByYear W20184294982020 @default.
- W2018429498 crossrefType "journal-article" @default.
- W2018429498 hasAuthorship W2018429498A5065370677 @default.
- W2018429498 hasAuthorship W2018429498A5091757136 @default.
- W2018429498 hasConcept C110738630 @default.
- W2018429498 hasConcept C111368507 @default.
- W2018429498 hasConcept C120665830 @default.
- W2018429498 hasConcept C121332964 @default.
- W2018429498 hasConcept C127313418 @default.
- W2018429498 hasConcept C151730666 @default.
- W2018429498 hasConcept C171250308 @default.
- W2018429498 hasConcept C185592680 @default.
- W2018429498 hasConcept C192562407 @default.
- W2018429498 hasConcept C200096950 @default.
- W2018429498 hasConcept C207114421 @default.
- W2018429498 hasConcept C2777289219 @default.
- W2018429498 hasConcept C2779227376 @default.
- W2018429498 hasConcept C2816523 @default.
- W2018429498 hasConcept C3792809 @default.
- W2018429498 hasConcept C49040817 @default.
- W2018429498 hasConcept C57410435 @default.
- W2018429498 hasConcept C64297162 @default.
- W2018429498 hasConcept C77557913 @default.
- W2018429498 hasConcept C8010536 @default.
- W2018429498 hasConcept C86803240 @default.
- W2018429498 hasConceptScore W2018429498C110738630 @default.
- W2018429498 hasConceptScore W2018429498C111368507 @default.
- W2018429498 hasConceptScore W2018429498C120665830 @default.
- W2018429498 hasConceptScore W2018429498C121332964 @default.
- W2018429498 hasConceptScore W2018429498C127313418 @default.
- W2018429498 hasConceptScore W2018429498C151730666 @default.
- W2018429498 hasConceptScore W2018429498C171250308 @default.
- W2018429498 hasConceptScore W2018429498C185592680 @default.
- W2018429498 hasConceptScore W2018429498C192562407 @default.
- W2018429498 hasConceptScore W2018429498C200096950 @default.
- W2018429498 hasConceptScore W2018429498C207114421 @default.
- W2018429498 hasConceptScore W2018429498C2777289219 @default.
- W2018429498 hasConceptScore W2018429498C2779227376 @default.
- W2018429498 hasConceptScore W2018429498C2816523 @default.
- W2018429498 hasConceptScore W2018429498C3792809 @default.
- W2018429498 hasConceptScore W2018429498C49040817 @default.
- W2018429498 hasConceptScore W2018429498C57410435 @default.
- W2018429498 hasConceptScore W2018429498C64297162 @default.
- W2018429498 hasConceptScore W2018429498C77557913 @default.
- W2018429498 hasConceptScore W2018429498C8010536 @default.
- W2018429498 hasConceptScore W2018429498C86803240 @default.
- W2018429498 hasIssue "1-2" @default.
- W2018429498 hasLocation W20184294981 @default.
- W2018429498 hasOpenAccess W2018429498 @default.
- W2018429498 hasPrimaryLocation W20184294981 @default.
- W2018429498 hasRelatedWork W1978868452 @default.
- W2018429498 hasRelatedWork W2042359192 @default.
- W2018429498 hasRelatedWork W2044723653 @default.
- W2018429498 hasRelatedWork W2056394430 @default.
- W2018429498 hasRelatedWork W2058539049 @default.
- W2018429498 hasRelatedWork W2074611704 @default.
- W2018429498 hasRelatedWork W2089939722 @default.
- W2018429498 hasRelatedWork W2323737708 @default.
- W2018429498 hasRelatedWork W87179318 @default.
- W2018429498 hasRelatedWork W1982021287 @default.
- W2018429498 hasVolume "335" @default.
- W2018429498 isParatext "false" @default.
- W2018429498 isRetracted "false" @default.
- W2018429498 magId "2018429498" @default.
- W2018429498 workType "article" @default.