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- W2018494086 abstract "Abstract Partially scaled 0.25μm NMOS transistors have been fabricated using X-ray lithography with synchrotron radiation (SRL). In this paper the present quality of this technique combined with the application of the X-ray sensitive resist RAY PF will be discussed with Special regard to pattern transfer and linewidth control. Fabrication process steps of the NMOS transistors are presented and electrical data of the devices are discussed." @default.
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- W2018494086 date "1991-03-01" @default.
- W2018494086 modified "2023-10-16" @default.
- W2018494086 title "A 0,25μm NMOS transistor fabricated with X-ray lithography" @default.
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- W2018494086 doi "https://doi.org/10.1016/0167-9317(91)90102-j" @default.
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