Matches in SemOpenAlex for { <https://semopenalex.org/work/W2018518634> ?p ?o ?g. }
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- W2018518634 endingPage "3354" @default.
- W2018518634 startingPage "3347" @default.
- W2018518634 abstract "Positive photoresists are widely used in lithographic process for the fabrication of relief components. When exposed to UV radiation they suffer chemical reactions modifying their chemical and physical properties. Aiming to follow molecular modifications among two different photoresists unexposed and previously exposed to ultraviolet light we have employed spectroscopic techniques coupled with mass spectrometry in the study of the AZ-1518 and AZ-4620 photoresists. The photon stimulated ion desorption (PSID) technique following the S K-edge NEXAFS spectrum was employed at the brazilian synchrotron light source (LNLS), during single-bunch operation and using time-of-flight mass spectrometry (TOF-MS) for ion analysis. NEXAFS and PSID mass spectra on both AZ-1518 and AZ-4620 photoresists (unexposed and exposed) were obtained and relative desorption ion yield curves determined for the main fragments as a function of the photon energy. They present marked different PSID spectra. Fragments related to the photochemical decomposition of the AZ-1518 photoresist could be clearly identified differently from the AZ-4620. Studies on the hardness of both photoresists were performed using O2 plasma reactive ion etching (RIE) technique, analyzed by scanning electron microscopy (SEM) and used to explain different desorption yields in the PSID spectra. These results show that the PSID technique is adequate to investigate structural changes in molecular level in different unexposed and exposed photoresists, which is crucial for improving our knowledge about the breakup process." @default.
- W2018518634 created "2016-06-24" @default.
- W2018518634 creator A5001599017 @default.
- W2018518634 creator A5009837072 @default.
- W2018518634 creator A5022418586 @default.
- W2018518634 creator A5045976992 @default.
- W2018518634 creator A5067192173 @default.
- W2018518634 creator A5085412807 @default.
- W2018518634 creator A5086582606 @default.
- W2018518634 date "2009-12-01" @default.
- W2018518634 modified "2023-10-01" @default.
- W2018518634 title "Photoresists comparative analysis using soft X-ray synchrotron radiation and time-of-flight mass spectrometry" @default.
- W2018518634 cites W1581137768 @default.
- W2018518634 cites W1971795292 @default.
- W2018518634 cites W1980509499 @default.
- W2018518634 cites W1984903167 @default.
- W2018518634 cites W1996490983 @default.
- W2018518634 cites W1998630049 @default.
- W2018518634 cites W2004547496 @default.
- W2018518634 cites W2017869730 @default.
- W2018518634 cites W2027735468 @default.
- W2018518634 cites W2046567726 @default.
- W2018518634 cites W2067537996 @default.
- W2018518634 cites W2072665155 @default.
- W2018518634 cites W2081128815 @default.
- W2018518634 cites W2087529041 @default.
- W2018518634 cites W2091640995 @default.
- W2018518634 cites W2093768676 @default.
- W2018518634 cites W2156653646 @default.
- W2018518634 cites W2282306296 @default.
- W2018518634 cites W3042758387 @default.
- W2018518634 doi "https://doi.org/10.1016/j.eurpolymj.2009.10.010" @default.
- W2018518634 hasPublicationYear "2009" @default.
- W2018518634 type Work @default.
- W2018518634 sameAs 2018518634 @default.
- W2018518634 citedByCount "8" @default.
- W2018518634 countsByYear W20185186342012 @default.
- W2018518634 countsByYear W20185186342014 @default.
- W2018518634 countsByYear W20185186342016 @default.
- W2018518634 countsByYear W20185186342019 @default.
- W2018518634 countsByYear W20185186342020 @default.
- W2018518634 crossrefType "journal-article" @default.
- W2018518634 hasAuthorship W2018518634A5001599017 @default.
- W2018518634 hasAuthorship W2018518634A5009837072 @default.
- W2018518634 hasAuthorship W2018518634A5022418586 @default.
- W2018518634 hasAuthorship W2018518634A5045976992 @default.
- W2018518634 hasAuthorship W2018518634A5067192173 @default.
- W2018518634 hasAuthorship W2018518634A5085412807 @default.
- W2018518634 hasAuthorship W2018518634A5086582606 @default.
- W2018518634 hasConcept C113196181 @default.
- W2018518634 hasConcept C120665830 @default.
- W2018518634 hasConcept C121332964 @default.
- W2018518634 hasConcept C145148216 @default.
- W2018518634 hasConcept C147789679 @default.
- W2018518634 hasConcept C150394285 @default.
- W2018518634 hasConcept C162356407 @default.
- W2018518634 hasConcept C162711632 @default.
- W2018518634 hasConcept C16332341 @default.
- W2018518634 hasConcept C178790620 @default.
- W2018518634 hasConcept C185592680 @default.
- W2018518634 hasConcept C192562407 @default.
- W2018518634 hasConcept C21368211 @default.
- W2018518634 hasConcept C40325409 @default.
- W2018518634 hasConcept C43617362 @default.
- W2018518634 hasConceptScore W2018518634C113196181 @default.
- W2018518634 hasConceptScore W2018518634C120665830 @default.
- W2018518634 hasConceptScore W2018518634C121332964 @default.
- W2018518634 hasConceptScore W2018518634C145148216 @default.
- W2018518634 hasConceptScore W2018518634C147789679 @default.
- W2018518634 hasConceptScore W2018518634C150394285 @default.
- W2018518634 hasConceptScore W2018518634C162356407 @default.
- W2018518634 hasConceptScore W2018518634C162711632 @default.
- W2018518634 hasConceptScore W2018518634C16332341 @default.
- W2018518634 hasConceptScore W2018518634C178790620 @default.
- W2018518634 hasConceptScore W2018518634C185592680 @default.
- W2018518634 hasConceptScore W2018518634C192562407 @default.
- W2018518634 hasConceptScore W2018518634C21368211 @default.
- W2018518634 hasConceptScore W2018518634C40325409 @default.
- W2018518634 hasConceptScore W2018518634C43617362 @default.
- W2018518634 hasIssue "12" @default.
- W2018518634 hasLocation W20185186341 @default.
- W2018518634 hasOpenAccess W2018518634 @default.
- W2018518634 hasPrimaryLocation W20185186341 @default.
- W2018518634 hasRelatedWork W1976104865 @default.
- W2018518634 hasRelatedWork W1984005343 @default.
- W2018518634 hasRelatedWork W1993791637 @default.
- W2018518634 hasRelatedWork W2026642978 @default.
- W2018518634 hasRelatedWork W2039221321 @default.
- W2018518634 hasRelatedWork W2052934995 @default.
- W2018518634 hasRelatedWork W2073281719 @default.
- W2018518634 hasRelatedWork W2088681527 @default.
- W2018518634 hasRelatedWork W2115089515 @default.
- W2018518634 hasRelatedWork W2151138508 @default.
- W2018518634 hasVolume "45" @default.
- W2018518634 isParatext "false" @default.
- W2018518634 isRetracted "false" @default.
- W2018518634 magId "2018518634" @default.
- W2018518634 workType "article" @default.