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- W2018528377 abstract "The high precision off-axis asphere mirrors are quite usefull in the modern sapce optical system.in this paper, theion beam figuring is researched to accomplish the final surface accuracy. Firstly, The IBF machine we used is introducedsimplely. The correction method for the distortion in off-axis mirror interference measurement is studied. Beacasue ofthe curve shape of the off-axis mirror, the changing of the removal function was analyzed simply. In order to testify thereaserch, a 1100mm×800mm off-axis aspheric mirror is finished by ion beam figuring. After 2 times polishing, thesurface error was corrected to RMS 9nm in full aperture and achieved 6.3nm in sub- aperture." @default.
- W2018528377 created "2016-06-24" @default.
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- W2018528377 date "2014-11-18" @default.
- W2018528377 modified "2023-09-23" @default.
- W2018528377 title "Nano-scale finishing of off-axis aspheric mirror by ion beam figuring" @default.
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- W2018528377 doi "https://doi.org/10.1117/12.2071418" @default.
- W2018528377 hasPublicationYear "2014" @default.
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