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- W2018646564 abstract "This paper demonstrates that zeolites (i.e., Sil-1, ZSM-5 and TS-1) can be employed as catalysts, membrane or structural materials in miniature chemical devices. Traditional semiconductor fabrication technology was employed in micromachining the device architecture. The fabricated miniature zeolite-based structures find applications as catalytic microreactors and membrane microseparators. Four strategies for the manufacture of zeolite catalytic microreactors were discussed: zeolite powder coating, uniform zeolite film growth, localized zeolite growth, and etching of zeolite–silicon composite film. These zeolites were deposited either as film or discrete islands with controlled particle size, crystal morphology, layer thickness (3–16 μm) and film orientation (e.g., highly oriented (1 0 1) and (2 0 0) films). Crystal intergrowth was also manipulated through the use of growth inhibitors. Silicalite-1 was also prepared as free-standing membrane for zeolite membrane microseparators." @default.
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- W2018646564 date "2001-02-01" @default.
- W2018646564 modified "2023-10-14" @default.
- W2018646564 title "Design and fabrication of zeolite-based microreactors and membrane microseparators" @default.
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- W2018646564 doi "https://doi.org/10.1016/s1387-1811(00)00332-2" @default.
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