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- W2018654903 abstract "A toroidal plasma source for plasma deposition at the University of Sydney (PLADEPUS) has been developed for studies of deposition of thin films, such as titanium nitride (TiN). This article describes measurements of the plasma parameters at a low rf power input, the experimental setup of the preliminary thin film deposition and the method of titanium (Ti) atom injection into the plasma by using a small current Ti arc. The microstructure of the TiN thin films is analyzed and the results are presented." @default.
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- W2018654903 title "Application of a toroidal plasma source to TiN thin film deposition" @default.
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- W2018654903 doi "https://doi.org/10.1116/1.581304" @default.
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