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- W2018673586 abstract "The behavior of ionic sputtered particles during rf sputtering of metal and oxide targets (Cu, Ni, CuO, NiO and GeO 2 ) was examined as a function of oxygen content in argon-oxygen sputtering gas by mass spectrometric analysis. The ionic sputtered particles were found to be mainly atomic and monoxide particles regardless of the kind of target. The relative amount of monoxide sputtered particles was dependent upon the kind of target and increased with the addition of oxygen into sputtering gas. From the relation between the relative amount of monoxide sputtered particle and oxygen content, the possibility of the reaction of an atomic sputtered particle with oxygen in plasma is suggested. The relative amount of monoxide sputtered particle was correlated with the variation of enthalpy for the formation of monoxide sputtered particle." @default.
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- W2018673586 title "Behavior of atomic and molecular sputtered particles during rf sputtering in ArO2 atmospheres" @default.
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- W2018673586 doi "https://doi.org/10.1016/0022-3093(90)90271-m" @default.
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