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• W2018689267 abstract "The rate of kink generation in ultralow dissolved-oxygen water (LOW) at a <112̄> oriented atomic step on a Si(111) surface was experimentally determined. By controlling the step length by adding SiO 2 line patterns that prevent kink propagation across the patterns, it was found that step flow velocity was proportional to step length when the step was short. From the proportionality coefficient, the rate of kink generation was evaluated to be 800 cm -1 s -1 . Furthermore, the velocity of kink propagation along a step was also evaluated as 40 nm/s." @default.
• W2018689267 created "2016-06-24" @default.
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• W2018689267 date "2013-10-24" @default.
• W2018689267 modified "2023-09-26" @default.
• W2018689267 title "Evaluation of Kink Generation Rate and Step Flow Velocity on Si(111) during Wet Etching" @default.
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• W2018689267 doi "https://doi.org/10.7567/jjap.52.110127" @default.
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