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- W2018723403 abstract "When Si was doped into an AlN layer during metalorganic vapor-phase epitaxial growth, the Al density (N Al ) in the AlN layer decreased but the N density (N N ) did not change. The decrease in N Al was almost the same as the Si density (N si ). As N si increased in Si-doped AlN, the lattice constant decreased. These results can be explained by Si atoms replacing Al atoms in Si-doped AlN and subsequent Si–N bond formation. Thus, Si-doped AlN becomes a substitutional solid solution of Al 1- x Si x N ternary alloy. The highest Si density at which the x-ray diffraction peak still appears was 5.8×10 21 cm -3 ( x =12%)." @default.
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- W2018723403 date "2001-10-01" @default.
- W2018723403 modified "2023-09-25" @default.
- W2018723403 title "Formation of Solid Solution of Al1-xSixN (0<x≤ 12%) Ternary Alloy" @default.
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- W2018723403 doi "https://doi.org/10.1143/jjap.40.l1048" @default.
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