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- W2018778242 abstract "Abstract A metal-film microbolometer formed on a glass membrane suspended on a silicon substrate has been fabricated by the anisotropic etching technique. The rectangular glass membrane is supported by its four leads connected to the corners of an etched V-groove cavity. This structure allows flexible thermal management and sensitivity optimization of the bolometer for different kinds of application, with a trade-off between lead thermal impedance and device active area. Optimizations of the structure applied to both a focal-plane array and a single detector are interpreted. A thermal impedance as high as 4 × 10 5 °C/W with a response time of several milliseconds can be achieved. For a 320 μm x 320 μm detector, theoretical predictions give a responsivity and normalized detectivity of over 700 V/W and 10 9 cm √/Hz/W, respectively. For dimensions of 128 μm × 128 μm, suitable for a focal-plane-array detector, theory predicts a D * of 5.5 × 10 8 . A discrepancy exists between the experiment and the theory, which is also discussed." @default.
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- W2018778242 title "Design considerations of metal-film bolometer with micromachined floating membrane" @default.
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- W2018778242 doi "https://doi.org/10.1016/0924-4247(92)80165-y" @default.
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