Matches in SemOpenAlex for { <https://semopenalex.org/work/W2018839028> ?p ?o ?g. }
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- W2018839028 endingPage "3683" @default.
- W2018839028 startingPage "3682" @default.
- W2018839028 abstract "A dissociative excitation reaction of BrCN with the Ar electron cyclotron resonance (ECR) plasma was applied to synthesize mechanically hard amorphous carbon nitride (a-CNx) films. The hardness of the films has been measured by a nanoindenter to be at most 15 GPa under the maximum loading force of 50 mN. The self-bias voltage, -Vself, and the I–V characteristics have been measured to discuss the mechanism of hardening of the a-CNx films. It was confirmed that -Vself causes the Ar ion bombardment on the surface of the films, leading to the high hardness value of the films without applying an external bias voltage." @default.
- W2018839028 created "2016-06-24" @default.
- W2018839028 creator A5012948281 @default.
- W2018839028 creator A5040623007 @default.
- W2018839028 creator A5049914092 @default.
- W2018839028 creator A5060833210 @default.
- W2018839028 date "2003-06-15" @default.
- W2018839028 modified "2023-10-16" @default.
- W2018839028 title "Roles of Ions and Free Electrons in the Synthesis of Mechanically Hard Amorphous-CN<sub><i>x</i></sub>Films Using a Dissociative Excitation Reaction of BrCN with the Ar Electron Cyclotron Resonance Plasma" @default.
- W2018839028 cites W1997775225 @default.
- W2018839028 cites W2036993563 @default.
- W2018839028 cites W2044197995 @default.
- W2018839028 cites W2056588874 @default.
- W2018839028 cites W2064167223 @default.
- W2018839028 cites W2079862686 @default.
- W2018839028 cites W2083301082 @default.
- W2018839028 cites W574836794 @default.
- W2018839028 doi "https://doi.org/10.1143/jjap.42.3682" @default.
- W2018839028 hasPublicationYear "2003" @default.
- W2018839028 type Work @default.
- W2018839028 sameAs 2018839028 @default.
- W2018839028 citedByCount "4" @default.
- W2018839028 countsByYear W20188390282012 @default.
- W2018839028 countsByYear W20188390282015 @default.
- W2018839028 crossrefType "journal-article" @default.
- W2018839028 hasAuthorship W2018839028A5012948281 @default.
- W2018839028 hasAuthorship W2018839028A5040623007 @default.
- W2018839028 hasAuthorship W2018839028A5049914092 @default.
- W2018839028 hasAuthorship W2018839028A5060833210 @default.
- W2018839028 hasConcept C121332964 @default.
- W2018839028 hasConcept C145148216 @default.
- W2018839028 hasConcept C147120987 @default.
- W2018839028 hasConcept C178790620 @default.
- W2018839028 hasConcept C184779094 @default.
- W2018839028 hasConcept C185592680 @default.
- W2018839028 hasConcept C192562407 @default.
- W2018839028 hasConcept C56052488 @default.
- W2018839028 hasConcept C62520636 @default.
- W2018839028 hasConcept C75473681 @default.
- W2018839028 hasConcept C8010536 @default.
- W2018839028 hasConcept C83581075 @default.
- W2018839028 hasConceptScore W2018839028C121332964 @default.
- W2018839028 hasConceptScore W2018839028C145148216 @default.
- W2018839028 hasConceptScore W2018839028C147120987 @default.
- W2018839028 hasConceptScore W2018839028C178790620 @default.
- W2018839028 hasConceptScore W2018839028C184779094 @default.
- W2018839028 hasConceptScore W2018839028C185592680 @default.
- W2018839028 hasConceptScore W2018839028C192562407 @default.
- W2018839028 hasConceptScore W2018839028C56052488 @default.
- W2018839028 hasConceptScore W2018839028C62520636 @default.
- W2018839028 hasConceptScore W2018839028C75473681 @default.
- W2018839028 hasConceptScore W2018839028C8010536 @default.
- W2018839028 hasConceptScore W2018839028C83581075 @default.
- W2018839028 hasIssue "Part 1, No. 6A" @default.
- W2018839028 hasLocation W20188390281 @default.
- W2018839028 hasOpenAccess W2018839028 @default.
- W2018839028 hasPrimaryLocation W20188390281 @default.
- W2018839028 hasRelatedWork W2004914832 @default.
- W2018839028 hasRelatedWork W2018322003 @default.
- W2018839028 hasRelatedWork W2033770392 @default.
- W2018839028 hasRelatedWork W2035999282 @default.
- W2018839028 hasRelatedWork W2037544642 @default.
- W2018839028 hasRelatedWork W2070540292 @default.
- W2018839028 hasRelatedWork W2073245979 @default.
- W2018839028 hasRelatedWork W2142929710 @default.
- W2018839028 hasRelatedWork W2317165715 @default.
- W2018839028 hasRelatedWork W99228725 @default.
- W2018839028 hasVolume "42" @default.
- W2018839028 isParatext "false" @default.
- W2018839028 isRetracted "false" @default.
- W2018839028 magId "2018839028" @default.
- W2018839028 workType "article" @default.