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- W2018848248 abstract "Sputtering yields of iron and titanium cathodes have been measured over wide ranges: (0.1 < p < 0.373 mbar) and (0.25 < jd < 1 mA/cm2) of oxygen pressure (p) and current density (jd) of the O2/Fe discharge. The effective sputtering yields Yefs run from 0.0017 up to 0.136 [AFe/AO]. These yields are very low if compared with those characteristic of other discharge sets. The Monte-Carlo modelling of the oxygen plasma–metallic cathode interface allows the explanation of the effect of plasma characteristics on these yields and a stoichiometry of the cathode subsurface layer. High oxidation of subsurface cathode layer, redeposition of sputtered atoms and non-volatile character of metal oxides are main reasons for low values of effective sputtering yields as well as their dependence on working gas pressure." @default.
- W2018848248 created "2016-06-24" @default.
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- W2018848248 date "2009-05-01" @default.
- W2018848248 modified "2023-09-27" @default.
- W2018848248 title "Fe and Ti cathodes sputtering by oxygen plasma in DC glow discharges" @default.
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- W2018848248 doi "https://doi.org/10.1016/j.vacuum.2009.01.026" @default.
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