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- W2019024062 abstract "— It is shown that meta-stable de-excitation spectroscopy (MDS) is one of the most useful characterization methods to analyze the interaction between the discharge gas and the surface of the material and is applied to MgO:Al,N films. From the results of the measurement and analysis of helium MDS and the in-situ discharge experiment, it is confirmed that the limited composition films of MgO:Al,N have potentially a larger secondary-electron-emission coefficient (γ) compared with that of MgO. The improvement in γ is caused by the electron-occupied tailing state at around the top of the valence band which is generated by the introduction of Al,N to MgO films. Also, the O1s spectra measured by x-ray photoelectron spectroscopy (XPS) shows that the stable surfaces are formed with the introduction of Al,N to MgO films." @default.
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- W2019024062 date "2011-01-01" @default.
- W2019024062 modified "2023-09-27" @default.
- W2019024062 title "Surface characterization of MgO:Al,N films with meta-stable de-excitation spectroscopy and x-ray photoelectron spectroscopy" @default.
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- W2019024062 doi "https://doi.org/10.1889/jsid19.1.8" @default.
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