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- W2019062185 abstract "Micro holes which diameters are more than 0.1 mm are mechanically machined. However since the ideal sharp cutting edges are difficult to be made in micro drills, fine geometrical shape of micro holes is difficult to be obtained. In this study, the influence of the geometrical shape of cutting edge is experimentally discussed. In order to carry out experimental evaluation, focused ion beam is used to make the geometrical shapes of micro drills." @default.
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- W2019062185 date "2012-09-01" @default.
- W2019062185 modified "2023-09-26" @default.
- W2019062185 title "Effect of Machining of Small Tools by Means of Focused Ion Beam" @default.
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- W2019062185 doi "https://doi.org/10.4028/www.scientific.net/amr.565.588" @default.
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