FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2019085569> ?p ?o ?g. }

• W2019085569 endingPage "4210" @default.
• W2019085569 startingPage "4210" @default.
• W2019085569 abstract "Properties of DC-sputtered W-Ti absorber films such as internal stress, density and microstructure were systematically investigated for X-ray mask application. Smooth, stress-free amorphous W-Ti films with a comparatively high density of 16.5-17.0 g/cm 3 were obtained by optimizing several conditions: gas pressure, N 2 content in the working gas, DC power density and annealing temperature. The reproducibility of the film stress was about ±5×10 7 Pa. Reproducibility was found to be mainly determined by the degree to which the sputtering tool used could be controlled. Furthermore, it was confirmed that the optimized absorber films offered good stability under stress within 1×10 7 Pa when stored in an air atmosphere for more than 250 days." @default.
• W2019085569 created "2016-06-24" @default.
• W2019085569 creator A5024719822 @default.
• W2019085569 creator A5043598725 @default.
• W2019085569 creator A5048937697 @default.
• W2019085569 creator A5062845909 @default.
• W2019085569 creator A5067767778 @default.
• W2019085569 creator A5068597702 @default.
• W2019085569 creator A5085403136 @default.
• W2019085569 date "1992-12-01" @default.
• W2019085569 modified "2023-09-23" @default.
• W2019085569 title "Sputtered W-Ti Film for X-Ray Mask Absorber" @default.
• W2019085569 cites W1966349690 @default.
• W2019085569 cites W1969378772 @default.
• W2019085569 cites W1986746568 @default.
• W2019085569 cites W2006134460 @default.
• W2019085569 cites W2012803606 @default.
• W2019085569 cites W2013419624 @default.
• W2019085569 cites W2014811495 @default.
• W2019085569 cites W2015366921 @default.
• W2019085569 cites W2025801381 @default.
• W2019085569 cites W2040802309 @default.
• W2019085569 cites W2044721771 @default.
• W2019085569 cites W2046660524 @default.
• W2019085569 cites W2048413069 @default.
• W2019085569 cites W2073521644 @default.
• W2019085569 cites W2093176538 @default.
• W2019085569 doi "https://doi.org/10.1143/jjap.31.4210" @default.
• W2019085569 hasPublicationYear "1992" @default.
• W2019085569 type Work @default.
• W2019085569 sameAs 2019085569 @default.
• W2019085569 citedByCount "17" @default.
• W2019085569 crossrefType "journal-article" @default.
• W2019085569 hasAuthorship W2019085569A5024719822 @default.
• W2019085569 hasAuthorship W2019085569A5043598725 @default.
• W2019085569 hasAuthorship W2019085569A5048937697 @default.
• W2019085569 hasAuthorship W2019085569A5062845909 @default.
• W2019085569 hasAuthorship W2019085569A5067767778 @default.
• W2019085569 hasAuthorship W2019085569A5068597702 @default.
• W2019085569 hasAuthorship W2019085569A5085403136 @default.
• W2019085569 hasConcept C113196181 @default.
• W2019085569 hasConcept C121332964 @default.
• W2019085569 hasConcept C127413603 @default.
• W2019085569 hasConcept C138885662 @default.
• W2019085569 hasConcept C159985019 @default.
• W2019085569 hasConcept C163258240 @default.
• W2019085569 hasConcept C171250308 @default.
• W2019085569 hasConcept C185592680 @default.
• W2019085569 hasConcept C19067145 @default.
• W2019085569 hasConcept C192562407 @default.
• W2019085569 hasConcept C21036866 @default.
• W2019085569 hasConcept C21881925 @default.
• W2019085569 hasConcept C22423302 @default.
• W2019085569 hasConcept C2777855556 @default.
• W2019085569 hasConcept C2987918405 @default.
• W2019085569 hasConcept C41895202 @default.
• W2019085569 hasConcept C43617362 @default.
• W2019085569 hasConcept C56052488 @default.
• W2019085569 hasConcept C61427134 @default.
• W2019085569 hasConcept C62520636 @default.
• W2019085569 hasConcept C78762247 @default.
• W2019085569 hasConcept C8010536 @default.
• W2019085569 hasConcept C87976508 @default.
• W2019085569 hasConcept C9893847 @default.
• W2019085569 hasConceptScore W2019085569C113196181 @default.
• W2019085569 hasConceptScore W2019085569C121332964 @default.
• W2019085569 hasConceptScore W2019085569C127413603 @default.
• W2019085569 hasConceptScore W2019085569C138885662 @default.
• W2019085569 hasConceptScore W2019085569C159985019 @default.
• W2019085569 hasConceptScore W2019085569C163258240 @default.
• W2019085569 hasConceptScore W2019085569C171250308 @default.
• W2019085569 hasConceptScore W2019085569C185592680 @default.
• W2019085569 hasConceptScore W2019085569C19067145 @default.
• W2019085569 hasConceptScore W2019085569C192562407 @default.
• W2019085569 hasConceptScore W2019085569C21036866 @default.
• W2019085569 hasConceptScore W2019085569C21881925 @default.
• W2019085569 hasConceptScore W2019085569C22423302 @default.
• W2019085569 hasConceptScore W2019085569C2777855556 @default.
• W2019085569 hasConceptScore W2019085569C2987918405 @default.
• W2019085569 hasConceptScore W2019085569C41895202 @default.
• W2019085569 hasConceptScore W2019085569C43617362 @default.
• W2019085569 hasConceptScore W2019085569C56052488 @default.
• W2019085569 hasConceptScore W2019085569C61427134 @default.
• W2019085569 hasConceptScore W2019085569C62520636 @default.
• W2019085569 hasConceptScore W2019085569C78762247 @default.
• W2019085569 hasConceptScore W2019085569C8010536 @default.
• W2019085569 hasConceptScore W2019085569C87976508 @default.
• W2019085569 hasConceptScore W2019085569C9893847 @default.
• W2019085569 hasIssue "12S" @default.
• W2019085569 hasLocation W20190855691 @default.
• W2019085569 hasOpenAccess W2019085569 @default.
• W2019085569 hasPrimaryLocation W20190855691 @default.
• W2019085569 hasRelatedWork W1562941104 @default.
• W2019085569 hasRelatedWork W1968511315 @default.
• W2019085569 hasRelatedWork W2033637232 @default.
• W2019085569 hasRelatedWork W2078317612 @default.
• W2019085569 hasRelatedWork W2080790698 @default.
• W2019085569 hasRelatedWork W2316948141 @default.

• next