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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2019113489> ?p ?o ?g. }

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• W2019113489 abstract "A pressure sensor for use in a high temperature atmosphere (150˜250°C) has been developed. The pressure sensor consists of Cr-O thin film strain gauges, electrode films and an oxidation resistance film, which are all sputter deposited on a metal diaphragm covered with an SiO2 insulator. For the pressure measurement, a photolithographically patterned Wheatstone bridge circuit of the Cr-O thin film strain gauges was used. The output voltages showed good linearity with pressure and little hysteresis even at a temperature of 250°C. In order to prevent oxidation of the strain gauges at high temperatures, some sputtered oxidation resistance films were examined. It was shown that non-oxide films such as AlN and Si3N4 films have good characteristics to prevent oxidation of the strain gauges." @default.
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• W2019113489 date "2004-01-01" @default.
• W2019113489 modified "2023-09-25" @default.
• W2019113489 title "Development of Pressure Sensors for High Temperature Operation" @default.
• W2019113489 cites W2510416421 @default.
• W2019113489 doi "https://doi.org/10.1541/ieejsmas.124.183" @default.
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