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- W2019249567 abstract "Ion beam mixing (IBM) on Pd/Si with Ar+ ions has been studied by using RBS and TEM. The evaporated Pd film of 450 Å thick onto Si (111) were irradiated to various doses at 78 keV. It was found that the mixed layer has an equilibrium compound Pd2Si and it remained as a crystallite with further irradiation at room temperature. The interfacial mixing increases with dose which coincides with the theoretical model of cascade mixing. The bond breaking model and the lower formation temperature of Pd2Si in IBM (25°C) compared to the thermal method (200°C) are discussed." @default.
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- W2019249567 title "Ion beam mixing of Pd/Si bilayers" @default.
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