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- W2019289560 abstract "In this paper we give experimental evidence that the thickness of a layer of silicon stripped by anodic oxidation is solely dependent on the anodically grown thickness of the oxide and is independent of the electrolyte and of other parameters of the experiment. A correlation is established between the thickness of a stripped layer of silicon and that of the oxide. This relation may be used to determine profiles in silicon by means of anodic oxidation." @default.
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- W2019289560 date "1981-02-01" @default.
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- W2019289560 title "Calibration for the anodic oxidation of silicon" @default.
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- W2019289560 doi "https://doi.org/10.1016/0040-6090(81)90693-3" @default.
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