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- W2019295763 abstract "The angle-resolved scattering measurement is an important indication of the fabrication errors and manufacturing limitations in the emerging technology of binary optics. A simple instrument is described which is capable of measuring scattered light from 1 degree to 0.01 degrees or closer to the main transmitted beam, and down to levels of one-billionth of the peak intensity. Scatter measurements are reported for a binary optic and are compared to the power spectral density function determined by a WYKO profiler. It is found that the binary fabrication process has increased the near-angle scatter by about a factor of 30X the scatter from the smooth surface. The power spectral density measurement does not compare well with the scattering data." @default.
- W2019295763 created "2016-06-24" @default.
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- W2019295763 date "1987-01-01" @default.
- W2019295763 modified "2023-09-23" @default.
- W2019295763 title "Near-Angle Scattered Light From Binary Optics" @default.
- W2019295763 doi "https://doi.org/10.1117/12.967438" @default.
- W2019295763 hasPublicationYear "1987" @default.
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