Matches in SemOpenAlex for { <https://semopenalex.org/work/W2019331377> ?p ?o ?g. }
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- W2019331377 endingPage "4520" @default.
- W2019331377 startingPage "4520" @default.
- W2019331377 abstract "Resolution capability of synchrotron radiation based proximity lithography has been investigated in the sub-quarter micrometer range using an advanced X-ray stepper and high resolution SiC/W X-ray masks. High resolution tungsten gratings and single lines as small as 60 nm are now currently available. Such masks were tested by contact printing in the L2M lithography station implemented at Super-ACO synchrotron facility in Orsay-France. Also, the influence of diffraction on feature sizes was studied with 30-40 µm proximity gap using various positive and negative resists: PMMA, RAY-PF, SAL 601. It was found that 0.10 to 0.12 µm linewidths can be achieved for gratings and 0.15 to 0.20 µm for isolated lines. This resolution limit can be overpassed by a double exposure technique associated with a lateral mask-stage translation. Examples of feature size down to 80 nm were readily achieved at 40 µm gap." @default.
- W2019331377 created "2016-06-24" @default.
- W2019331377 creator A5000718357 @default.
- W2019331377 creator A5005113685 @default.
- W2019331377 creator A5037262995 @default.
- W2019331377 creator A5060002303 @default.
- W2019331377 creator A5086425118 @default.
- W2019331377 date "1992-12-01" @default.
- W2019331377 modified "2023-09-25" @default.
- W2019331377 title "Recent Developments for Sub-Quarter Micrometer Fabrication" @default.
- W2019331377 cites W2004693051 @default.
- W2019331377 cites W2016636292 @default.
- W2019331377 cites W2027947959 @default.
- W2019331377 cites W2083047959 @default.
- W2019331377 cites W2116219772 @default.
- W2019331377 doi "https://doi.org/10.1143/jjap.31.4520" @default.
- W2019331377 hasPublicationYear "1992" @default.
- W2019331377 type Work @default.
- W2019331377 sameAs 2019331377 @default.
- W2019331377 citedByCount "4" @default.
- W2019331377 crossrefType "journal-article" @default.
- W2019331377 hasAuthorship W2019331377A5000718357 @default.
- W2019331377 hasAuthorship W2019331377A5005113685 @default.
- W2019331377 hasAuthorship W2019331377A5037262995 @default.
- W2019331377 hasAuthorship W2019331377A5060002303 @default.
- W2019331377 hasAuthorship W2019331377A5086425118 @default.
- W2019331377 hasConcept C105487726 @default.
- W2019331377 hasConcept C120665830 @default.
- W2019331377 hasConcept C121332964 @default.
- W2019331377 hasConcept C136525101 @default.
- W2019331377 hasConcept C138268822 @default.
- W2019331377 hasConcept C142724271 @default.
- W2019331377 hasConcept C145695476 @default.
- W2019331377 hasConcept C14737013 @default.
- W2019331377 hasConcept C154945302 @default.
- W2019331377 hasConcept C16332341 @default.
- W2019331377 hasConcept C171250308 @default.
- W2019331377 hasConcept C171635847 @default.
- W2019331377 hasConcept C187504802 @default.
- W2019331377 hasConcept C191897082 @default.
- W2019331377 hasConcept C192562407 @default.
- W2019331377 hasConcept C204223013 @default.
- W2019331377 hasConcept C204787440 @default.
- W2019331377 hasConcept C21368211 @default.
- W2019331377 hasConcept C2779227376 @default.
- W2019331377 hasConcept C41008148 @default.
- W2019331377 hasConcept C41794268 @default.
- W2019331377 hasConcept C49040817 @default.
- W2019331377 hasConcept C53524968 @default.
- W2019331377 hasConcept C542268612 @default.
- W2019331377 hasConcept C71924100 @default.
- W2019331377 hasConceptScore W2019331377C105487726 @default.
- W2019331377 hasConceptScore W2019331377C120665830 @default.
- W2019331377 hasConceptScore W2019331377C121332964 @default.
- W2019331377 hasConceptScore W2019331377C136525101 @default.
- W2019331377 hasConceptScore W2019331377C138268822 @default.
- W2019331377 hasConceptScore W2019331377C142724271 @default.
- W2019331377 hasConceptScore W2019331377C145695476 @default.
- W2019331377 hasConceptScore W2019331377C14737013 @default.
- W2019331377 hasConceptScore W2019331377C154945302 @default.
- W2019331377 hasConceptScore W2019331377C16332341 @default.
- W2019331377 hasConceptScore W2019331377C171250308 @default.
- W2019331377 hasConceptScore W2019331377C171635847 @default.
- W2019331377 hasConceptScore W2019331377C187504802 @default.
- W2019331377 hasConceptScore W2019331377C191897082 @default.
- W2019331377 hasConceptScore W2019331377C192562407 @default.
- W2019331377 hasConceptScore W2019331377C204223013 @default.
- W2019331377 hasConceptScore W2019331377C204787440 @default.
- W2019331377 hasConceptScore W2019331377C21368211 @default.
- W2019331377 hasConceptScore W2019331377C2779227376 @default.
- W2019331377 hasConceptScore W2019331377C41008148 @default.
- W2019331377 hasConceptScore W2019331377C41794268 @default.
- W2019331377 hasConceptScore W2019331377C49040817 @default.
- W2019331377 hasConceptScore W2019331377C53524968 @default.
- W2019331377 hasConceptScore W2019331377C542268612 @default.
- W2019331377 hasConceptScore W2019331377C71924100 @default.
- W2019331377 hasIssue "12S" @default.
- W2019331377 hasLocation W20193313771 @default.
- W2019331377 hasOpenAccess W2019331377 @default.
- W2019331377 hasPrimaryLocation W20193313771 @default.
- W2019331377 hasRelatedWork W1599891132 @default.
- W2019331377 hasRelatedWork W1976663320 @default.
- W2019331377 hasRelatedWork W2007789449 @default.
- W2019331377 hasRelatedWork W2031124237 @default.
- W2019331377 hasRelatedWork W2037063969 @default.
- W2019331377 hasRelatedWork W2040243143 @default.
- W2019331377 hasRelatedWork W2082999803 @default.
- W2019331377 hasRelatedWork W2099827585 @default.
- W2019331377 hasRelatedWork W2347814675 @default.
- W2019331377 hasRelatedWork W2349948918 @default.
- W2019331377 hasVolume "31" @default.
- W2019331377 isParatext "false" @default.
- W2019331377 isRetracted "false" @default.
- W2019331377 magId "2019331377" @default.
- W2019331377 workType "article" @default.