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- W2019415105 endingPage "6549" @default.
- W2019415105 startingPage "6549" @default.
- W2019415105 abstract "The original Rayleigh equations for resolution, R and depth of focus, DOF, are becoming less useful as new steppers incorporate the variable coherence factor, σ, and numerical aperture, NA. We describe here simple extensions of the Rayleigh equations to partially coherent illumination, which allow us to optimize values of NA and σ according to the wavelength, λ, and the required image contrast, C , when projecting the image of a grating object. Experimental values agree well with those derived from the equations." @default.
- W2019415105 created "2016-06-24" @default.
- W2019415105 creator A5079832439 @default.
- W2019415105 date "1994-12-01" @default.
- W2019415105 modified "2023-10-14" @default.
- W2019415105 title "Analytical Description of Partially Coherent Optical Systems for Optimization of Numerical Aperture and Degree of Coherence" @default.
- W2019415105 cites W1982279403 @default.
- W2019415105 cites W1998972077 @default.
- W2019415105 cites W2028115912 @default.
- W2019415105 cites W2039719149 @default.
- W2019415105 cites W2047067589 @default.
- W2019415105 cites W2051989131 @default.
- W2019415105 cites W2056334332 @default.
- W2019415105 cites W2078644916 @default.
- W2019415105 cites W2089727005 @default.
- W2019415105 doi "https://doi.org/10.1143/jjap.33.6549" @default.
- W2019415105 hasPublicationYear "1994" @default.
- W2019415105 type Work @default.
- W2019415105 sameAs 2019415105 @default.
- W2019415105 citedByCount "1" @default.
- W2019415105 countsByYear W20194151052017 @default.
- W2019415105 crossrefType "journal-article" @default.
- W2019415105 hasAuthorship W2019415105A5079832439 @default.
- W2019415105 hasConcept C105795698 @default.
- W2019415105 hasConcept C10801956 @default.
- W2019415105 hasConcept C111472728 @default.
- W2019415105 hasConcept C120665830 @default.
- W2019415105 hasConcept C121332964 @default.
- W2019415105 hasConcept C134306372 @default.
- W2019415105 hasConcept C138268822 @default.
- W2019415105 hasConcept C138885662 @default.
- W2019415105 hasConcept C154945302 @default.
- W2019415105 hasConcept C159108749 @default.
- W2019415105 hasConcept C182365436 @default.
- W2019415105 hasConcept C192209626 @default.
- W2019415105 hasConcept C24890656 @default.
- W2019415105 hasConcept C2775997480 @default.
- W2019415105 hasConcept C2777813233 @default.
- W2019415105 hasConcept C2780586882 @default.
- W2019415105 hasConcept C2781181686 @default.
- W2019415105 hasConcept C33923547 @default.
- W2019415105 hasConcept C41008148 @default.
- W2019415105 hasConcept C46244369 @default.
- W2019415105 hasConcept C6260449 @default.
- W2019415105 hasConcept C78336883 @default.
- W2019415105 hasConceptScore W2019415105C105795698 @default.
- W2019415105 hasConceptScore W2019415105C10801956 @default.
- W2019415105 hasConceptScore W2019415105C111472728 @default.
- W2019415105 hasConceptScore W2019415105C120665830 @default.
- W2019415105 hasConceptScore W2019415105C121332964 @default.
- W2019415105 hasConceptScore W2019415105C134306372 @default.
- W2019415105 hasConceptScore W2019415105C138268822 @default.
- W2019415105 hasConceptScore W2019415105C138885662 @default.
- W2019415105 hasConceptScore W2019415105C154945302 @default.
- W2019415105 hasConceptScore W2019415105C159108749 @default.
- W2019415105 hasConceptScore W2019415105C182365436 @default.
- W2019415105 hasConceptScore W2019415105C192209626 @default.
- W2019415105 hasConceptScore W2019415105C24890656 @default.
- W2019415105 hasConceptScore W2019415105C2775997480 @default.
- W2019415105 hasConceptScore W2019415105C2777813233 @default.
- W2019415105 hasConceptScore W2019415105C2780586882 @default.
- W2019415105 hasConceptScore W2019415105C2781181686 @default.
- W2019415105 hasConceptScore W2019415105C33923547 @default.
- W2019415105 hasConceptScore W2019415105C41008148 @default.
- W2019415105 hasConceptScore W2019415105C46244369 @default.
- W2019415105 hasConceptScore W2019415105C6260449 @default.
- W2019415105 hasConceptScore W2019415105C78336883 @default.
- W2019415105 hasIssue "12R" @default.
- W2019415105 hasLocation W20194151051 @default.
- W2019415105 hasOpenAccess W2019415105 @default.
- W2019415105 hasPrimaryLocation W20194151051 @default.
- W2019415105 hasRelatedWork W1997530175 @default.
- W2019415105 hasRelatedWork W2014086495 @default.
- W2019415105 hasRelatedWork W2019415105 @default.
- W2019415105 hasRelatedWork W2083576564 @default.
- W2019415105 hasRelatedWork W2089615691 @default.
- W2019415105 hasRelatedWork W2093746750 @default.
- W2019415105 hasRelatedWork W2792708477 @default.
- W2019415105 hasRelatedWork W2944438779 @default.
- W2019415105 hasRelatedWork W3038931463 @default.
- W2019415105 hasRelatedWork W4226357389 @default.
- W2019415105 hasVolume "33" @default.
- W2019415105 isParatext "false" @default.
- W2019415105 isRetracted "false" @default.
- W2019415105 magId "2019415105" @default.
- W2019415105 workType "article" @default.