Matches in SemOpenAlex for { <https://semopenalex.org/work/W2019421276> ?p ?o ?g. }
Showing items 1 to 53 of
53
with 100 items per page.
- W2019421276 endingPage "120" @default.
- W2019421276 startingPage "117" @default.
- W2019421276 abstract "Aberration averaging effects have been simulated for a ZEISS projection system. Several modeling strategies are discussed. Simulation results for typical process data demonstrate the good performance of the projection system for scanners." @default.
- W2019421276 created "2016-06-24" @default.
- W2019421276 creator A5034569280 @default.
- W2019421276 creator A5083240643 @default.
- W2019421276 date "1998-03-01" @default.
- W2019421276 modified "2023-09-26" @default.
- W2019421276 title "The impact of aberration averaging during step-and-scan on the photolithographic process" @default.
- W2019421276 cites W2056599268 @default.
- W2019421276 doi "https://doi.org/10.1016/s0167-9317(98)00025-2" @default.
- W2019421276 hasPublicationYear "1998" @default.
- W2019421276 type Work @default.
- W2019421276 sameAs 2019421276 @default.
- W2019421276 citedByCount "3" @default.
- W2019421276 countsByYear W20194212762016 @default.
- W2019421276 countsByYear W20194212762019 @default.
- W2019421276 countsByYear W20194212762023 @default.
- W2019421276 crossrefType "journal-article" @default.
- W2019421276 hasAuthorship W2019421276A5034569280 @default.
- W2019421276 hasAuthorship W2019421276A5083240643 @default.
- W2019421276 hasConcept C111919701 @default.
- W2019421276 hasConcept C11413529 @default.
- W2019421276 hasConcept C120665830 @default.
- W2019421276 hasConcept C121332964 @default.
- W2019421276 hasConcept C41008148 @default.
- W2019421276 hasConcept C57493831 @default.
- W2019421276 hasConcept C98045186 @default.
- W2019421276 hasConceptScore W2019421276C111919701 @default.
- W2019421276 hasConceptScore W2019421276C11413529 @default.
- W2019421276 hasConceptScore W2019421276C120665830 @default.
- W2019421276 hasConceptScore W2019421276C121332964 @default.
- W2019421276 hasConceptScore W2019421276C41008148 @default.
- W2019421276 hasConceptScore W2019421276C57493831 @default.
- W2019421276 hasConceptScore W2019421276C98045186 @default.
- W2019421276 hasLocation W20194212761 @default.
- W2019421276 hasOpenAccess W2019421276 @default.
- W2019421276 hasPrimaryLocation W20194212761 @default.
- W2019421276 hasRelatedWork W1965661087 @default.
- W2019421276 hasRelatedWork W2015255849 @default.
- W2019421276 hasRelatedWork W2015436473 @default.
- W2019421276 hasRelatedWork W2026061493 @default.
- W2019421276 hasRelatedWork W2057372545 @default.
- W2019421276 hasRelatedWork W2329889124 @default.
- W2019421276 hasRelatedWork W2351009956 @default.
- W2019421276 hasRelatedWork W2386671494 @default.
- W2019421276 hasRelatedWork W2612637862 @default.
- W2019421276 hasRelatedWork W2012842278 @default.
- W2019421276 hasVolume "41-42" @default.
- W2019421276 isParatext "false" @default.
- W2019421276 isRetracted "false" @default.
- W2019421276 magId "2019421276" @default.
- W2019421276 workType "article" @default.