Matches in SemOpenAlex for { <https://semopenalex.org/work/W2019468315> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2019468315 endingPage "377" @default.
- W2019468315 startingPage "375" @default.
- W2019468315 abstract "Segregation of fluorine in a SiO2/Si structure has been examined with respect to depth profile and paramagnetic defects at the SiO2/Si interface. The fluorine distribution was found to be restricted to a narrow (less than 35 Å) interface region on the oxide side. Furthermore, a greater amount of fluorine segregation was observed for (111) than for (100) interfaces. These observations suggest that fluorine segregation is caused by intrinsic defects in the interface region and that fluorine atoms terminate the defects. In fact, electron spin resonance measurements provide direct confirmation that fluorine atoms terminate the trivalent Si dangling bonds at the interface." @default.
- W2019468315 created "2016-06-24" @default.
- W2019468315 creator A5030691326 @default.
- W2019468315 creator A5048338630 @default.
- W2019468315 creator A5073522326 @default.
- W2019468315 date "1993-01-25" @default.
- W2019468315 modified "2023-10-16" @default.
- W2019468315 title "Segregation and defect termination of fluorine at SiO2/Si interfaces" @default.
- W2019468315 cites W1975868821 @default.
- W2019468315 cites W1984206214 @default.
- W2019468315 cites W1994541739 @default.
- W2019468315 cites W2000681000 @default.
- W2019468315 cites W2020508592 @default.
- W2019468315 cites W2029707735 @default.
- W2019468315 cites W2029807574 @default.
- W2019468315 cites W2030463200 @default.
- W2019468315 cites W2031718663 @default.
- W2019468315 cites W4234512409 @default.
- W2019468315 doi "https://doi.org/10.1063/1.108961" @default.
- W2019468315 hasPublicationYear "1993" @default.
- W2019468315 type Work @default.
- W2019468315 sameAs 2019468315 @default.
- W2019468315 citedByCount "21" @default.
- W2019468315 countsByYear W20194683152014 @default.
- W2019468315 countsByYear W20194683152017 @default.
- W2019468315 countsByYear W20194683152021 @default.
- W2019468315 countsByYear W20194683152022 @default.
- W2019468315 crossrefType "journal-article" @default.
- W2019468315 hasAuthorship W2019468315A5030691326 @default.
- W2019468315 hasAuthorship W2019468315A5048338630 @default.
- W2019468315 hasAuthorship W2019468315A5073522326 @default.
- W2019468315 hasConcept C121332964 @default.
- W2019468315 hasConcept C124712363 @default.
- W2019468315 hasConcept C159467904 @default.
- W2019468315 hasConcept C164675345 @default.
- W2019468315 hasConcept C185592680 @default.
- W2019468315 hasConcept C187961010 @default.
- W2019468315 hasConcept C191897082 @default.
- W2019468315 hasConcept C192562407 @default.
- W2019468315 hasConcept C26873012 @default.
- W2019468315 hasConcept C2779851234 @default.
- W2019468315 hasConcept C32424582 @default.
- W2019468315 hasConcept C46141821 @default.
- W2019468315 hasConcept C506198293 @default.
- W2019468315 hasConcept C544956773 @default.
- W2019468315 hasConcept C8010536 @default.
- W2019468315 hasConceptScore W2019468315C121332964 @default.
- W2019468315 hasConceptScore W2019468315C124712363 @default.
- W2019468315 hasConceptScore W2019468315C159467904 @default.
- W2019468315 hasConceptScore W2019468315C164675345 @default.
- W2019468315 hasConceptScore W2019468315C185592680 @default.
- W2019468315 hasConceptScore W2019468315C187961010 @default.
- W2019468315 hasConceptScore W2019468315C191897082 @default.
- W2019468315 hasConceptScore W2019468315C192562407 @default.
- W2019468315 hasConceptScore W2019468315C26873012 @default.
- W2019468315 hasConceptScore W2019468315C2779851234 @default.
- W2019468315 hasConceptScore W2019468315C32424582 @default.
- W2019468315 hasConceptScore W2019468315C46141821 @default.
- W2019468315 hasConceptScore W2019468315C506198293 @default.
- W2019468315 hasConceptScore W2019468315C544956773 @default.
- W2019468315 hasConceptScore W2019468315C8010536 @default.
- W2019468315 hasIssue "4" @default.
- W2019468315 hasLocation W20194683151 @default.
- W2019468315 hasOpenAccess W2019468315 @default.
- W2019468315 hasPrimaryLocation W20194683151 @default.
- W2019468315 hasRelatedWork W1509583728 @default.
- W2019468315 hasRelatedWork W1975536894 @default.
- W2019468315 hasRelatedWork W1981011544 @default.
- W2019468315 hasRelatedWork W2015289208 @default.
- W2019468315 hasRelatedWork W2049559097 @default.
- W2019468315 hasRelatedWork W2082337540 @default.
- W2019468315 hasRelatedWork W2084125114 @default.
- W2019468315 hasRelatedWork W2084916282 @default.
- W2019468315 hasRelatedWork W2165766367 @default.
- W2019468315 hasRelatedWork W3196640749 @default.
- W2019468315 hasVolume "62" @default.
- W2019468315 isParatext "false" @default.
- W2019468315 isRetracted "false" @default.
- W2019468315 magId "2019468315" @default.
- W2019468315 workType "article" @default.