Matches in SemOpenAlex for { <https://semopenalex.org/work/W2019470847> ?p ?o ?g. }
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- W2019470847 endingPage "2336" @default.
- W2019470847 startingPage "2330" @default.
- W2019470847 abstract "Non-destructive thickness measurement of sub-0.5 μm silicon epitaxial films has been performed using spectroscopic ellipsometry (SE) in the near infrared to visible range (0.75–3 eV). The undoped epitaxial films were grown on heavily doped substrates by chemical vapor deposition at 700–900 °C. The effect of heavy doping on the optical properties of crystalline silicon in the spectral range 0.75–3 eV is precisely described by the Drude free carrier model. It is shown that SE can simultaneously determine the substrate dopant concentration, the thicknesses of the epitaxial film and native oxide, and if present, the thickness of the transition layer between the epitaxial film and the substrate. The epitaxial film thicknesses measured by SE were in excellent agreement with results of secondary ion mass spectrometry (SIMS). The substrate dopant concentrations measured by SE also agree well with SIMS results for n-type substrates, but are consistently higher than SIMS values for p-type substrates. It was also demonstrated that SE can be used for process monitoring in low temperature silicon epitaxy. This study identifies a non-destructive thickness measurement technique for sub-0.5 μm silicon epitaxial films which are expected to be widely used in future semiconductor devices." @default.
- W2019470847 created "2016-06-24" @default.
- W2019470847 creator A5039965421 @default.
- W2019470847 creator A5085687046 @default.
- W2019470847 date "1998-07-01" @default.
- W2019470847 modified "2023-10-17" @default.
- W2019470847 title "Metrology of sub-0.5 μm silicon epitaxial films" @default.
- W2019470847 cites W1965437664 @default.
- W2019470847 cites W1969837543 @default.
- W2019470847 cites W1982488675 @default.
- W2019470847 cites W1982675568 @default.
- W2019470847 cites W1988639161 @default.
- W2019470847 cites W2024706078 @default.
- W2019470847 cites W2024972608 @default.
- W2019470847 cites W2050972474 @default.
- W2019470847 cites W2054092027 @default.
- W2019470847 cites W2067320242 @default.
- W2019470847 cites W2073562563 @default.
- W2019470847 cites W2092400004 @default.
- W2019470847 cites W2153361040 @default.
- W2019470847 cites W2171727727 @default.
- W2019470847 doi "https://doi.org/10.1116/1.581348" @default.
- W2019470847 hasPublicationYear "1998" @default.
- W2019470847 type Work @default.
- W2019470847 sameAs 2019470847 @default.
- W2019470847 citedByCount "2" @default.
- W2019470847 crossrefType "journal-article" @default.
- W2019470847 hasAuthorship W2019470847A5039965421 @default.
- W2019470847 hasAuthorship W2019470847A5085687046 @default.
- W2019470847 hasConcept C110738630 @default.
- W2019470847 hasConcept C111368507 @default.
- W2019470847 hasConcept C113196181 @default.
- W2019470847 hasConcept C127313418 @default.
- W2019470847 hasConcept C162356407 @default.
- W2019470847 hasConcept C171250308 @default.
- W2019470847 hasConcept C18293161 @default.
- W2019470847 hasConcept C185592680 @default.
- W2019470847 hasConcept C19067145 @default.
- W2019470847 hasConcept C191952053 @default.
- W2019470847 hasConcept C192562407 @default.
- W2019470847 hasConcept C2777289219 @default.
- W2019470847 hasConcept C2779227376 @default.
- W2019470847 hasConcept C43617362 @default.
- W2019470847 hasConcept C49040817 @default.
- W2019470847 hasConcept C544956773 @default.
- W2019470847 hasConcept C57410435 @default.
- W2019470847 hasConcept C57863236 @default.
- W2019470847 hasConcept C77671233 @default.
- W2019470847 hasConceptScore W2019470847C110738630 @default.
- W2019470847 hasConceptScore W2019470847C111368507 @default.
- W2019470847 hasConceptScore W2019470847C113196181 @default.
- W2019470847 hasConceptScore W2019470847C127313418 @default.
- W2019470847 hasConceptScore W2019470847C162356407 @default.
- W2019470847 hasConceptScore W2019470847C171250308 @default.
- W2019470847 hasConceptScore W2019470847C18293161 @default.
- W2019470847 hasConceptScore W2019470847C185592680 @default.
- W2019470847 hasConceptScore W2019470847C19067145 @default.
- W2019470847 hasConceptScore W2019470847C191952053 @default.
- W2019470847 hasConceptScore W2019470847C192562407 @default.
- W2019470847 hasConceptScore W2019470847C2777289219 @default.
- W2019470847 hasConceptScore W2019470847C2779227376 @default.
- W2019470847 hasConceptScore W2019470847C43617362 @default.
- W2019470847 hasConceptScore W2019470847C49040817 @default.
- W2019470847 hasConceptScore W2019470847C544956773 @default.
- W2019470847 hasConceptScore W2019470847C57410435 @default.
- W2019470847 hasConceptScore W2019470847C57863236 @default.
- W2019470847 hasConceptScore W2019470847C77671233 @default.
- W2019470847 hasIssue "4" @default.
- W2019470847 hasLocation W20194708471 @default.
- W2019470847 hasOpenAccess W2019470847 @default.
- W2019470847 hasPrimaryLocation W20194708471 @default.
- W2019470847 hasRelatedWork W193437229 @default.
- W2019470847 hasRelatedWork W1965789664 @default.
- W2019470847 hasRelatedWork W1982635368 @default.
- W2019470847 hasRelatedWork W2019470847 @default.
- W2019470847 hasRelatedWork W2047621091 @default.
- W2019470847 hasRelatedWork W2094311901 @default.
- W2019470847 hasRelatedWork W2110878774 @default.
- W2019470847 hasRelatedWork W2158021730 @default.
- W2019470847 hasRelatedWork W2381480651 @default.
- W2019470847 hasRelatedWork W3090699889 @default.
- W2019470847 hasVolume "16" @default.
- W2019470847 isParatext "false" @default.
- W2019470847 isRetracted "false" @default.
- W2019470847 magId "2019470847" @default.
- W2019470847 workType "article" @default.