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- W2019492012 abstract "Silicon-hydrogen microstructures in hydrogenated amorphous silicon films are characterized by nuclear magnetic resonance (NMR) measurements. Spectral differences are associated with hydrogen incorporation for several novel fabrication methods. It is found that hydrogen dilution of the SiH4/H2 mixture can produce a significant effect on the NMR results and that the NMR spectra tend to show a sharp line shape as the substrate temperature (Ts) is increased to about 300 °C. The hydrogen-atom-treatment method also produces the same effect even at a lower substrate temperature of about 250 °C." @default.
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- W2019492012 modified "2023-09-23" @default.
- W2019492012 title "Nuclear magnetic resonance study on Si-H microstructure in hydrogenated amorphous silicon prepared by diluted-hydrogen and hydrogen-atom-treatment methods" @default.
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- W2019492012 doi "https://doi.org/10.1063/1.108311" @default.
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