Matches in SemOpenAlex for { <https://semopenalex.org/work/W2019519118> ?p ?o ?g. }
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- W2019519118 endingPage "34" @default.
- W2019519118 startingPage "30" @default.
- W2019519118 abstract "CW CO2 laser CVD of a-Si:H was performed in a parallel configuration of the substrate and a horizontal CO2 laser beam. The influence of the deposition geometry (substrate position) onto the growth rate, the thickness profile, and the quality of intrinsic films were investigated. Increasing the distance between the vertical substrate and the laser beam beside it accelerated the film growth, changed the film morphology, and convection affected the film thickness profile. In addition, the vertical concentration profiles of disilane and hydrogen in the film forming region were determined by in situ gas analysis. The H2 concentration increase on the top coincides with a low film growth rate." @default.
- W2019519118 created "2016-06-24" @default.
- W2019519118 creator A5013335736 @default.
- W2019519118 creator A5044055949 @default.
- W2019519118 creator A5044134628 @default.
- W2019519118 creator A5078287835 @default.
- W2019519118 creator A5079817403 @default.
- W2019519118 creator A5083553782 @default.
- W2019519118 date "1992-01-01" @default.
- W2019519118 modified "2023-10-14" @default.
- W2019519118 title "CW CO2 laser CVD of amorphous hydrogenated silicon (a-Si:H): influence of the deposition geometry" @default.
- W2019519118 cites W1982511186 @default.
- W2019519118 cites W2018131909 @default.
- W2019519118 cites W2019584502 @default.
- W2019519118 cites W2047568963 @default.
- W2019519118 cites W2055794043 @default.
- W2019519118 cites W2088661356 @default.
- W2019519118 doi "https://doi.org/10.1016/0169-4332(92)90012-m" @default.
- W2019519118 hasPublicationYear "1992" @default.
- W2019519118 type Work @default.
- W2019519118 sameAs 2019519118 @default.
- W2019519118 citedByCount "6" @default.
- W2019519118 crossrefType "journal-article" @default.
- W2019519118 hasAuthorship W2019519118A5013335736 @default.
- W2019519118 hasAuthorship W2019519118A5044055949 @default.
- W2019519118 hasAuthorship W2019519118A5044134628 @default.
- W2019519118 hasAuthorship W2019519118A5078287835 @default.
- W2019519118 hasAuthorship W2019519118A5079817403 @default.
- W2019519118 hasAuthorship W2019519118A5083553782 @default.
- W2019519118 hasConcept C111368507 @default.
- W2019519118 hasConcept C113196181 @default.
- W2019519118 hasConcept C120665830 @default.
- W2019519118 hasConcept C121332964 @default.
- W2019519118 hasConcept C127313418 @default.
- W2019519118 hasConcept C151730666 @default.
- W2019519118 hasConcept C178790620 @default.
- W2019519118 hasConcept C185592680 @default.
- W2019519118 hasConcept C192562407 @default.
- W2019519118 hasConcept C2524010 @default.
- W2019519118 hasConcept C2776259327 @default.
- W2019519118 hasConcept C2776390347 @default.
- W2019519118 hasConcept C2777289219 @default.
- W2019519118 hasConcept C2779667780 @default.
- W2019519118 hasConcept C2816523 @default.
- W2019519118 hasConcept C33923547 @default.
- W2019519118 hasConcept C43617362 @default.
- W2019519118 hasConcept C49040817 @default.
- W2019519118 hasConcept C512968161 @default.
- W2019519118 hasConcept C520434653 @default.
- W2019519118 hasConcept C544956773 @default.
- W2019519118 hasConcept C56052488 @default.
- W2019519118 hasConcept C57410435 @default.
- W2019519118 hasConcept C64297162 @default.
- W2019519118 hasConcept C8010536 @default.
- W2019519118 hasConceptScore W2019519118C111368507 @default.
- W2019519118 hasConceptScore W2019519118C113196181 @default.
- W2019519118 hasConceptScore W2019519118C120665830 @default.
- W2019519118 hasConceptScore W2019519118C121332964 @default.
- W2019519118 hasConceptScore W2019519118C127313418 @default.
- W2019519118 hasConceptScore W2019519118C151730666 @default.
- W2019519118 hasConceptScore W2019519118C178790620 @default.
- W2019519118 hasConceptScore W2019519118C185592680 @default.
- W2019519118 hasConceptScore W2019519118C192562407 @default.
- W2019519118 hasConceptScore W2019519118C2524010 @default.
- W2019519118 hasConceptScore W2019519118C2776259327 @default.
- W2019519118 hasConceptScore W2019519118C2776390347 @default.
- W2019519118 hasConceptScore W2019519118C2777289219 @default.
- W2019519118 hasConceptScore W2019519118C2779667780 @default.
- W2019519118 hasConceptScore W2019519118C2816523 @default.
- W2019519118 hasConceptScore W2019519118C33923547 @default.
- W2019519118 hasConceptScore W2019519118C43617362 @default.
- W2019519118 hasConceptScore W2019519118C49040817 @default.
- W2019519118 hasConceptScore W2019519118C512968161 @default.
- W2019519118 hasConceptScore W2019519118C520434653 @default.
- W2019519118 hasConceptScore W2019519118C544956773 @default.
- W2019519118 hasConceptScore W2019519118C56052488 @default.
- W2019519118 hasConceptScore W2019519118C57410435 @default.
- W2019519118 hasConceptScore W2019519118C64297162 @default.
- W2019519118 hasConceptScore W2019519118C8010536 @default.
- W2019519118 hasLocation W20195191181 @default.
- W2019519118 hasOpenAccess W2019519118 @default.
- W2019519118 hasPrimaryLocation W20195191181 @default.
- W2019519118 hasRelatedWork W1983935286 @default.
- W2019519118 hasRelatedWork W2042925503 @default.
- W2019519118 hasRelatedWork W2065516818 @default.
- W2019519118 hasRelatedWork W2074945085 @default.
- W2019519118 hasRelatedWork W2083321254 @default.
- W2019519118 hasRelatedWork W2089633568 @default.
- W2019519118 hasRelatedWork W2094853359 @default.
- W2019519118 hasRelatedWork W2129859591 @default.
- W2019519118 hasRelatedWork W2921767964 @default.
- W2019519118 hasRelatedWork W2995897106 @default.
- W2019519118 hasVolume "54" @default.
- W2019519118 isParatext "false" @default.
- W2019519118 isRetracted "false" @default.
- W2019519118 magId "2019519118" @default.
- W2019519118 workType "article" @default.