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• W2019520072 endingPage "2480" @default.
• W2019520072 startingPage "2478" @default.
• W2019520072 abstract "The thickness dependence of constant voltage lifetime tests are compared for ultrathin oxides in the range of 50–125 Å. An apparent factor of 100 enhancement in the lifetime of 50 Å oxides relative to the 125 Å oxides is observed at a fixed electric field when the field in the oxide is calculated using the physical thickness of the oxide as determined by ellipsometry. When corrections are made for the distribution of electrons at the silicon interface including depletion in the silicon and quantum-mechanical screening effects then this apparent enhancement is reduced and all oxides have similar lifetimes at a fixed field. Such a rescaling of oxide reliability demonstrates the importance of accurate determination of electric field and oxide voltage in thin oxides and that oxide reliability is not significantly affected by thickness down to 50 Å, depending only on field. We compare different techniques for determining the effective thickness using current-voltage or capacitance-voltage (C-V) curves. We show that accurate estimates of the electric field can be obtained from integration of the C-V relation of the capacitor. When electric fields are calculated using C-V curves, a consistent set of extrapolation parameters can be obtained for all thicknesses." @default.
• W2019520072 created "2016-06-24" @default.
• W2019520072 creator A5057532371 @default.
• W2019520072 creator A5077991240 @default.
• W2019520072 creator A5082294514 @default.
• W2019520072 creator A5082781622 @default.
• W2019520072 creator A5088768173 @default.
• W2019520072 date "1997-10-27" @default.
• W2019520072 modified "2023-09-25" @default.
• W2019520072 title "Effect of electronic corrections on the thickness dependence of thin oxide reliability" @default.
• W2019520072 cites W2007210827 @default.
• W2019520072 cites W2051654956 @default.
• W2019520072 cites W2067165714 @default.
• W2019520072 cites W2106363228 @default.
• W2019520072 cites W4241205594 @default.
• W2019520072 doi "https://doi.org/10.1063/1.120093" @default.
• W2019520072 hasPublicationYear "1997" @default.
• W2019520072 type Work @default.
• W2019520072 sameAs 2019520072 @default.
• W2019520072 citedByCount "7" @default.
• W2019520072 countsByYear W20195200722015 @default.
• W2019520072 crossrefType "journal-article" @default.
• W2019520072 hasAuthorship W2019520072A5057532371 @default.
• W2019520072 hasAuthorship W2019520072A5077991240 @default.
• W2019520072 hasAuthorship W2019520072A5082294514 @default.
• W2019520072 hasAuthorship W2019520072A5082781622 @default.
• W2019520072 hasAuthorship W2019520072A5088768173 @default.
• W2019520072 hasConcept C113196181 @default.
• W2019520072 hasConcept C121332964 @default.
• W2019520072 hasConcept C132459708 @default.
• W2019520072 hasConcept C134306372 @default.
• W2019520072 hasConcept C147120987 @default.
• W2019520072 hasConcept C147789679 @default.
• W2019520072 hasConcept C159985019 @default.
• W2019520072 hasConcept C165801399 @default.
• W2019520072 hasConcept C171250308 @default.
• W2019520072 hasConcept C17525397 @default.
• W2019520072 hasConcept C18293161 @default.
• W2019520072 hasConcept C185592680 @default.
• W2019520072 hasConcept C19067145 @default.
• W2019520072 hasConcept C191897082 @default.
• W2019520072 hasConcept C192562407 @default.
• W2019520072 hasConcept C202444582 @default.
• W2019520072 hasConcept C204323151 @default.
• W2019520072 hasConcept C26873012 @default.
• W2019520072 hasConcept C2779851234 @default.
• W2019520072 hasConcept C30066665 @default.
• W2019520072 hasConcept C33923547 @default.
• W2019520072 hasConcept C43617362 @default.
• W2019520072 hasConcept C49040817 @default.
• W2019520072 hasConcept C52192207 @default.
• W2019520072 hasConcept C544956773 @default.
• W2019520072 hasConcept C60799052 @default.
• W2019520072 hasConcept C62520636 @default.
• W2019520072 hasConcept C9652623 @default.
• W2019520072 hasConceptScore W2019520072C113196181 @default.
• W2019520072 hasConceptScore W2019520072C121332964 @default.
• W2019520072 hasConceptScore W2019520072C132459708 @default.
• W2019520072 hasConceptScore W2019520072C134306372 @default.
• W2019520072 hasConceptScore W2019520072C147120987 @default.
• W2019520072 hasConceptScore W2019520072C147789679 @default.
• W2019520072 hasConceptScore W2019520072C159985019 @default.
• W2019520072 hasConceptScore W2019520072C165801399 @default.
• W2019520072 hasConceptScore W2019520072C171250308 @default.
• W2019520072 hasConceptScore W2019520072C17525397 @default.
• W2019520072 hasConceptScore W2019520072C18293161 @default.
• W2019520072 hasConceptScore W2019520072C185592680 @default.
• W2019520072 hasConceptScore W2019520072C19067145 @default.
• W2019520072 hasConceptScore W2019520072C191897082 @default.
• W2019520072 hasConceptScore W2019520072C192562407 @default.
• W2019520072 hasConceptScore W2019520072C202444582 @default.
• W2019520072 hasConceptScore W2019520072C204323151 @default.
• W2019520072 hasConceptScore W2019520072C26873012 @default.
• W2019520072 hasConceptScore W2019520072C2779851234 @default.
• W2019520072 hasConceptScore W2019520072C30066665 @default.
• W2019520072 hasConceptScore W2019520072C33923547 @default.
• W2019520072 hasConceptScore W2019520072C43617362 @default.
• W2019520072 hasConceptScore W2019520072C49040817 @default.
• W2019520072 hasConceptScore W2019520072C52192207 @default.
• W2019520072 hasConceptScore W2019520072C544956773 @default.
• W2019520072 hasConceptScore W2019520072C60799052 @default.
• W2019520072 hasConceptScore W2019520072C62520636 @default.
• W2019520072 hasConceptScore W2019520072C9652623 @default.
• W2019520072 hasIssue "17" @default.
• W2019520072 hasLocation W20195200721 @default.
• W2019520072 hasOpenAccess W2019520072 @default.
• W2019520072 hasPrimaryLocation W20195200721 @default.
• W2019520072 hasRelatedWork W1602345559 @default.
• W2019520072 hasRelatedWork W1994734669 @default.
• W2019520072 hasRelatedWork W2036264407 @default.
• W2019520072 hasRelatedWork W2167330343 @default.
• W2019520072 hasRelatedWork W2381953439 @default.
• W2019520072 hasRelatedWork W2585499428 @default.
• W2019520072 hasRelatedWork W2611817535 @default.
• W2019520072 hasRelatedWork W2800143249 @default.
• W2019520072 hasRelatedWork W4253731651 @default.
• W2019520072 hasRelatedWork W4285552524 @default.
• W2019520072 hasVolume "71" @default.

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