Matches in SemOpenAlex for { <https://semopenalex.org/work/W2019581214> ?p ?o ?g. }
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- W2019581214 endingPage "353" @default.
- W2019581214 startingPage "353" @default.
- W2019581214 abstract "A summary of the experimental observations of the optical emission from the Gaseous Electronics Conference (GEC) rf Reference Cell plasma will be discussed. Spatially and temporally resolved results are provided for various reference and non-reference conditions, including etching type plasmas. These measurements provide a detailed description of the temporal evolution of optical emission from different excited atomic states within different atomic and ionic species, as well as their radial and axial distributions. Some of the measurements have been placed on a absolute radiometric scale to provide comparisons to model calculations. Spectral line profile measurements are also presented to provide some insight into the multi-component particle velocities present in such plasmas." @default.
- W2019581214 created "2016-06-24" @default.
- W2019581214 creator A5049556732 @default.
- W2019581214 date "1995-07-01" @default.
- W2019581214 modified "2023-10-16" @default.
- W2019581214 title "Optical-Emission Spectroscopy on the Gaseous Electronics Conference Rf Reference Cell" @default.
- W2019581214 cites W1983616129 @default.
- W2019581214 cites W2040707601 @default.
- W2019581214 cites W2150541667 @default.
- W2019581214 cites W2328887226 @default.
- W2019581214 cites W2332204384 @default.
- W2019581214 doi "https://doi.org/10.6028/jres.100.027" @default.
- W2019581214 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/4887241" @default.
- W2019581214 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/29151747" @default.
- W2019581214 hasPublicationYear "1995" @default.
- W2019581214 type Work @default.
- W2019581214 sameAs 2019581214 @default.
- W2019581214 citedByCount "22" @default.
- W2019581214 countsByYear W20195812142012 @default.
- W2019581214 countsByYear W20195812142013 @default.
- W2019581214 countsByYear W20195812142017 @default.
- W2019581214 countsByYear W20195812142020 @default.
- W2019581214 crossrefType "journal-article" @default.
- W2019581214 hasAuthorship W2019581214A5049556732 @default.
- W2019581214 hasBestOaLocation W20195812141 @default.
- W2019581214 hasConcept C118495887 @default.
- W2019581214 hasConcept C121332964 @default.
- W2019581214 hasConcept C1276947 @default.
- W2019581214 hasConcept C181500209 @default.
- W2019581214 hasConcept C184779094 @default.
- W2019581214 hasConcept C185544564 @default.
- W2019581214 hasConcept C192562407 @default.
- W2019581214 hasConcept C30475298 @default.
- W2019581214 hasConcept C32891209 @default.
- W2019581214 hasConcept C43503373 @default.
- W2019581214 hasConcept C4839761 @default.
- W2019581214 hasConcept C62520636 @default.
- W2019581214 hasConcept C82706917 @default.
- W2019581214 hasConcept C95974651 @default.
- W2019581214 hasConcept C96141758 @default.
- W2019581214 hasConceptScore W2019581214C118495887 @default.
- W2019581214 hasConceptScore W2019581214C121332964 @default.
- W2019581214 hasConceptScore W2019581214C1276947 @default.
- W2019581214 hasConceptScore W2019581214C181500209 @default.
- W2019581214 hasConceptScore W2019581214C184779094 @default.
- W2019581214 hasConceptScore W2019581214C185544564 @default.
- W2019581214 hasConceptScore W2019581214C192562407 @default.
- W2019581214 hasConceptScore W2019581214C30475298 @default.
- W2019581214 hasConceptScore W2019581214C32891209 @default.
- W2019581214 hasConceptScore W2019581214C43503373 @default.
- W2019581214 hasConceptScore W2019581214C4839761 @default.
- W2019581214 hasConceptScore W2019581214C62520636 @default.
- W2019581214 hasConceptScore W2019581214C82706917 @default.
- W2019581214 hasConceptScore W2019581214C95974651 @default.
- W2019581214 hasConceptScore W2019581214C96141758 @default.
- W2019581214 hasIssue "4" @default.
- W2019581214 hasLocation W20195812141 @default.
- W2019581214 hasLocation W20195812142 @default.
- W2019581214 hasLocation W20195812143 @default.
- W2019581214 hasLocation W20195812144 @default.
- W2019581214 hasOpenAccess W2019581214 @default.
- W2019581214 hasPrimaryLocation W20195812141 @default.
- W2019581214 hasRelatedWork W1964810910 @default.
- W2019581214 hasRelatedWork W2024406893 @default.
- W2019581214 hasRelatedWork W2085623838 @default.
- W2019581214 hasRelatedWork W2088267136 @default.
- W2019581214 hasRelatedWork W2144451757 @default.
- W2019581214 hasRelatedWork W2318649727 @default.
- W2019581214 hasRelatedWork W2501745756 @default.
- W2019581214 hasRelatedWork W4366114137 @default.
- W2019581214 hasRelatedWork W4366114164 @default.
- W2019581214 hasRelatedWork W2134519267 @default.
- W2019581214 hasVolume "100" @default.
- W2019581214 isParatext "false" @default.
- W2019581214 isRetracted "false" @default.
- W2019581214 magId "2019581214" @default.
- W2019581214 workType "article" @default.