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- W2019592005 endingPage "438" @default.
- W2019592005 startingPage "436" @default.
- W2019592005 abstract "We have examined the structure of ultrathin ZrO2 layers on Si(001) using medium energy ion scattering and cross-sectional transmission electron microscopy. Films can be deposited on SiO2 layers with highly abrupt interfaces by atomic layer deposition. On HF stripped Si(001), nucleation was inhibited, resulting in poorer film morphology. ZrO2 showed remarkable stability against silicate formation, with no intermixing even after high temperature oxidation. The oxide is vulnerable to high temperature vacuum annealing, with silicidation occurring at temperatures above 900 °C." @default.
- W2019592005 created "2016-06-24" @default.
- W2019592005 creator A5008720521 @default.
- W2019592005 creator A5026279636 @default.
- W2019592005 creator A5028524575 @default.
- W2019592005 date "2000-01-24" @default.
- W2019592005 modified "2023-10-17" @default.
- W2019592005 title "Structure and stability of ultrathin zirconium oxide layers on Si(001)" @default.
- W2019592005 cites W1970200102 @default.
- W2019592005 cites W2016144889 @default.
- W2019592005 cites W2024166218 @default.
- W2019592005 cites W2038274823 @default.
- W2019592005 cites W2050276976 @default.
- W2019592005 cites W2072451721 @default.
- W2019592005 cites W2093622459 @default.
- W2019592005 cites W2101781928 @default.
- W2019592005 cites W2129951600 @default.
- W2019592005 doi "https://doi.org/10.1063/1.125779" @default.
- W2019592005 hasPublicationYear "2000" @default.
- W2019592005 type Work @default.
- W2019592005 sameAs 2019592005 @default.
- W2019592005 citedByCount "634" @default.
- W2019592005 countsByYear W20195920052012 @default.
- W2019592005 countsByYear W20195920052013 @default.
- W2019592005 countsByYear W20195920052014 @default.
- W2019592005 countsByYear W20195920052015 @default.
- W2019592005 countsByYear W20195920052016 @default.
- W2019592005 countsByYear W20195920052017 @default.
- W2019592005 countsByYear W20195920052018 @default.
- W2019592005 countsByYear W20195920052019 @default.
- W2019592005 countsByYear W20195920052020 @default.
- W2019592005 countsByYear W20195920052021 @default.
- W2019592005 countsByYear W20195920052022 @default.
- W2019592005 countsByYear W20195920052023 @default.
- W2019592005 crossrefType "journal-article" @default.
- W2019592005 hasAuthorship W2019592005A5008720521 @default.
- W2019592005 hasAuthorship W2019592005A5026279636 @default.
- W2019592005 hasAuthorship W2019592005A5028524575 @default.
- W2019592005 hasBestOaLocation W20195920051 @default.
- W2019592005 hasConcept C127413603 @default.
- W2019592005 hasConcept C146088050 @default.
- W2019592005 hasConcept C171250308 @default.
- W2019592005 hasConcept C178790620 @default.
- W2019592005 hasConcept C185592680 @default.
- W2019592005 hasConcept C191897082 @default.
- W2019592005 hasConcept C192562407 @default.
- W2019592005 hasConcept C2777335606 @default.
- W2019592005 hasConcept C2777855556 @default.
- W2019592005 hasConcept C2779227376 @default.
- W2019592005 hasConcept C2779851234 @default.
- W2019592005 hasConcept C42360764 @default.
- W2019592005 hasConcept C534791751 @default.
- W2019592005 hasConcept C61048295 @default.
- W2019592005 hasConceptScore W2019592005C127413603 @default.
- W2019592005 hasConceptScore W2019592005C146088050 @default.
- W2019592005 hasConceptScore W2019592005C171250308 @default.
- W2019592005 hasConceptScore W2019592005C178790620 @default.
- W2019592005 hasConceptScore W2019592005C185592680 @default.
- W2019592005 hasConceptScore W2019592005C191897082 @default.
- W2019592005 hasConceptScore W2019592005C192562407 @default.
- W2019592005 hasConceptScore W2019592005C2777335606 @default.
- W2019592005 hasConceptScore W2019592005C2777855556 @default.
- W2019592005 hasConceptScore W2019592005C2779227376 @default.
- W2019592005 hasConceptScore W2019592005C2779851234 @default.
- W2019592005 hasConceptScore W2019592005C42360764 @default.
- W2019592005 hasConceptScore W2019592005C534791751 @default.
- W2019592005 hasConceptScore W2019592005C61048295 @default.
- W2019592005 hasIssue "4" @default.
- W2019592005 hasLocation W20195920051 @default.
- W2019592005 hasOpenAccess W2019592005 @default.
- W2019592005 hasPrimaryLocation W20195920051 @default.
- W2019592005 hasRelatedWork W1973642805 @default.
- W2019592005 hasRelatedWork W1976592898 @default.
- W2019592005 hasRelatedWork W2002288621 @default.
- W2019592005 hasRelatedWork W2021975454 @default.
- W2019592005 hasRelatedWork W2035803209 @default.
- W2019592005 hasRelatedWork W2065273006 @default.
- W2019592005 hasRelatedWork W2076699769 @default.
- W2019592005 hasRelatedWork W2091865738 @default.
- W2019592005 hasRelatedWork W4205510562 @default.
- W2019592005 hasRelatedWork W4386091237 @default.
- W2019592005 hasVolume "76" @default.
- W2019592005 isParatext "false" @default.
- W2019592005 isRetracted "false" @default.
- W2019592005 magId "2019592005" @default.
- W2019592005 workType "article" @default.