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• W2019596327 abstract "Shallow fluorine-vacancy (FV) complexes in Si have been directly observed using variable-energy positron annihilation spectroscopy and secondary ion mass spectrometry. The FV complexes, introduced to combat the deactivation and transient-enhanced diffusion of ultrashallow boron, were observed in preamorphized Si wafers implanted with 0.5keV B and 10keV F ions at a dose of 1015cm−2, and then annealed isothermally at 800°C for times ranging from 1to2700s. The results are in agreement with a model which predicts that the complexes are of the form F3nVn, with n most probably being 1 and/or 2." @default.
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• W2019596327 date "2006-07-31" @default.
• W2019596327 modified "2023-09-25" @default.
• W2019596327 title "Fluorine-vacancy complexes in ultrashallow B-implanted Si" @default.
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• W2019596327 doi "https://doi.org/10.1063/1.2335594" @default.
• W2019596327 hasPublicationYear "2006" @default.
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