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- W2019652054 abstract "Carbon doped GaAs epitaxial layers have been grown using solid arsenic and trimethylgallium. Carbon incorporation, proceeding from the organic radicals, was found to be dependent on the hydrogen partial pressure. The latter was fixed by the introduction of nitrogen in the carrier gas. Controlled p-doping between 1016 and 1221 cm−3 has been obtained by adjusting the composition of the carrier gas. The growth rate of the layers was found to be reduced by the introduction of nitrogen. Mirrorlike surfaces were obtained if at least 2% hydrogen was mixed in the carrier gas, but only polycrystalline films could be grown in a pure nitrogen atmosphere." @default.
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- W2019652054 date "1993-05-10" @default.
- W2019652054 modified "2023-09-26" @default.
- W2019652054 title "Carbon doping in GaAs layers grown with trimethylgallium and solid arsenic in a mixture of hydrogen and nitrogen" @default.
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- W2019652054 doi "https://doi.org/10.1063/1.109389" @default.
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