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- W2019685886 abstract "In this study we tested ns-laser and an atomic layer deposition (ALD) for polishing and coating CNC-machined aluminum freeform mirrors that are used in a compact multipoint fiber optical probe. Two types of ALD coatings, aluminum oxide and silicon dioxide were tested. The surface roughness of mirrors was analyzed prior to and after nanosecond-laser polishing and coating them on a Beneq TFS 200 ALD device. The freeform aluminum mirrors with and without coatings were then measured with optical profiler. The results show that improvement in the surface roughness can be seen with ns-laser polished and ALD coated aluminum surfaces." @default.
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- W2019685886 date "2014-09-25" @default.
- W2019685886 modified "2023-09-27" @default.
- W2019685886 title "Manufacturing of freeform mirror by milling and altering its optical characteristics by Ns-laser polishing and ALD coatings" @default.
- W2019685886 doi "https://doi.org/10.1117/12.2061729" @default.
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