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• W2019752414 endingPage "530" @default.
• W2019752414 startingPage "525" @default.
• W2019752414 abstract "The results of etching of silicon surfaces with different crystallographic orientations in KOH solutions containing a nonionic surfactant Triton X-100 are presented in this paper. The etch rate ratio R(100)/R(110) >1, typical of KOH + IPA and TMAH + Triton X-100 mixtures, is achieved. The surface morphology of Si(hkl) wafers is closely investigated by SEM and AFM. The very low roughness of (110) and its vicinal (hh1) planes is observed and measured. In addition, the relatively smooth (h11) surfaces are obtained in the solution with Triton X-100 surfactant, as compared to the KOH solutions containing alcohols. Due to good smoothness of the studied surfaces, the KOH solution with Triton X-100 seems to be especially interesting for bulk micromachining employing non-standard (hkl) planes. The examples of mesas and trenches fabricated by anisotropic etching in the KOH solution containing Triton X-100 surfactant are presented. Keywords: silicon anisotropic etching;Triton X-100; potassium hydroxide; Si(hkl) surfaces" @default.
• W2019752414 created "2016-06-24" @default.
• W2019752414 creator A5009644792 @default.
• W2019752414 creator A5065067870 @default.
• W2019752414 date "2013-10-01" @default.
• W2019752414 modified "2023-09-26" @default.
• W2019752414 title "Application of triton X-100 surfactant for silicon anisotropic etching in KOH-based solutions" @default.
• W2019752414 cites W1966899581 @default.
• W2019752414 cites W1974439509 @default.
• W2019752414 cites W1975432346 @default.
• W2019752414 cites W1977995181 @default.
• W2019752414 cites W2062451182 @default.
• W2019752414 cites W2062891765 @default.
• W2019752414 cites W2080757045 @default.
• W2019752414 cites W2083316642 @default.
• W2019752414 cites W2090537646 @default.
• W2019752414 cites W2091427414 @default.
• W2019752414 cites W2110596014 @default.
• W2019752414 cites W2125116839 @default.
• W2019752414 doi "https://doi.org/10.2478/s13536-013-0130-8" @default.
• W2019752414 hasPublicationYear "2013" @default.
• W2019752414 type Work @default.
• W2019752414 sameAs 2019752414 @default.
• W2019752414 citedByCount "2" @default.
• W2019752414 countsByYear W20197524142020 @default.
• W2019752414 countsByYear W20197524142023 @default.
• W2019752414 crossrefType "journal-article" @default.
• W2019752414 hasAuthorship W2019752414A5009644792 @default.
• W2019752414 hasAuthorship W2019752414A5065067870 @default.
• W2019752414 hasConcept C100460472 @default.
• W2019752414 hasConcept C107365816 @default.
• W2019752414 hasConcept C113196181 @default.
• W2019752414 hasConcept C120665830 @default.
• W2019752414 hasConcept C121332964 @default.
• W2019752414 hasConcept C127413603 @default.
• W2019752414 hasConcept C159985019 @default.
• W2019752414 hasConcept C160671074 @default.
• W2019752414 hasConcept C171250308 @default.
• W2019752414 hasConcept C185592680 @default.
• W2019752414 hasConcept C192562407 @default.
• W2019752414 hasConcept C2777064678 @default.
• W2019752414 hasConcept C2779227376 @default.
• W2019752414 hasConcept C2779439175 @default.
• W2019752414 hasConcept C2780127704 @default.
• W2019752414 hasConcept C42360764 @default.
• W2019752414 hasConcept C43617362 @default.
• W2019752414 hasConcept C49040817 @default.
• W2019752414 hasConcept C499950583 @default.
• W2019752414 hasConcept C54355233 @default.
• W2019752414 hasConcept C544956773 @default.
• W2019752414 hasConcept C58226133 @default.
• W2019752414 hasConcept C6322943 @default.
• W2019752414 hasConcept C71039073 @default.
• W2019752414 hasConcept C85725439 @default.
• W2019752414 hasConcept C86803240 @default.
• W2019752414 hasConceptScore W2019752414C100460472 @default.
• W2019752414 hasConceptScore W2019752414C107365816 @default.
• W2019752414 hasConceptScore W2019752414C113196181 @default.
• W2019752414 hasConceptScore W2019752414C120665830 @default.
• W2019752414 hasConceptScore W2019752414C121332964 @default.
• W2019752414 hasConceptScore W2019752414C127413603 @default.
• W2019752414 hasConceptScore W2019752414C159985019 @default.
• W2019752414 hasConceptScore W2019752414C160671074 @default.
• W2019752414 hasConceptScore W2019752414C171250308 @default.
• W2019752414 hasConceptScore W2019752414C185592680 @default.
• W2019752414 hasConceptScore W2019752414C192562407 @default.
• W2019752414 hasConceptScore W2019752414C2777064678 @default.
• W2019752414 hasConceptScore W2019752414C2779227376 @default.
• W2019752414 hasConceptScore W2019752414C2779439175 @default.
• W2019752414 hasConceptScore W2019752414C2780127704 @default.
• W2019752414 hasConceptScore W2019752414C42360764 @default.
• W2019752414 hasConceptScore W2019752414C43617362 @default.
• W2019752414 hasConceptScore W2019752414C49040817 @default.
• W2019752414 hasConceptScore W2019752414C499950583 @default.
• W2019752414 hasConceptScore W2019752414C54355233 @default.
• W2019752414 hasConceptScore W2019752414C544956773 @default.
• W2019752414 hasConceptScore W2019752414C58226133 @default.
• W2019752414 hasConceptScore W2019752414C6322943 @default.
• W2019752414 hasConceptScore W2019752414C71039073 @default.
• W2019752414 hasConceptScore W2019752414C85725439 @default.
• W2019752414 hasConceptScore W2019752414C86803240 @default.
• W2019752414 hasIssue "4" @default.
• W2019752414 hasLocation W20197524141 @default.
• W2019752414 hasOpenAccess W2019752414 @default.
• W2019752414 hasPrimaryLocation W20197524141 @default.
• W2019752414 hasRelatedWork W1018789878 @default.
• W2019752414 hasRelatedWork W1970133672 @default.
• W2019752414 hasRelatedWork W1973574513 @default.
• W2019752414 hasRelatedWork W2078917126 @default.
• W2019752414 hasRelatedWork W2240919621 @default.
• W2019752414 hasRelatedWork W2365055564 @default.
• W2019752414 hasRelatedWork W2387343942 @default.
• W2019752414 hasRelatedWork W2403941506 @default.
• W2019752414 hasRelatedWork W2912137849 @default.
• W2019752414 hasRelatedWork W2942662716 @default.
• W2019752414 hasVolume "31" @default.
• W2019752414 isParatext "false" @default.
• W2019752414 isRetracted "false" @default.

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