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- W2019768567 abstract "We investigated the gas-phase reactions of source molecules for metalorganic chemical vapor deposition (MOCVD) of barium strontium titanate (BST) films to study how the precursors for each element are formed from the source molecules in the gas phase. By microdischarge optical emission spectroscopy (µD-OES) and in situ infrared absorption spectroscopy under actual CVD conditions, we found that the addition of oxidation gas has more effects on the creation of Sr precursors than that of Ti precursors. Moreover, we deposited strontium oxide, titanium oxide and strontium titanate (STO) films to investigate the deposition mechanism of BST films from various angles. The results of these deposition experiments were consistent with the precursor formation mechanism suggested from the spectroscopic diagnoses." @default.
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- W2019768567 date "2002-02-15" @default.
- W2019768567 modified "2023-09-24" @default.
- W2019768567 title "Film Precursor Formation in Metalorganic Chemical Vapor Deposition of Barium Strontium Titanate Films: A Study by Microdischarge Optical Emission Spectroscopy" @default.
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- W2019768567 doi "https://doi.org/10.1143/jjap.41.778" @default.
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