Matches in SemOpenAlex for { <https://semopenalex.org/work/W2019827436> ?p ?o ?g. }
Showing items 1 to 57 of
57
with 100 items per page.
- W2019827436 endingPage "439" @default.
- W2019827436 startingPage "436" @default.
- W2019827436 abstract "The authors have demonstrated the viability of forming an ohmic contact to InGaAs/InP structures by means of a load-locked integrated process. The wafer was loaded into a rapid-thermal low-pressure metallorganic chemical vapour deposition (RT-LPMOCVD) reactor and was exposed to a sequence of processes which led to the formation of an ohmic contact. After in situ cleaning of the wafer through a thermal cycle at 500 degrees C under a flow of tertiary-butylphosphine (TBP), which provided the free hydrogen needed for a mild etching of the surface, a layer of silicon oxide (SiOx) was deposited onto the InGaAs/InP via a rapid thermal cycle (500 degrees C, 30 s) in a low-pressure O2 and 2% diluted SiH4 chemical vapour deposition (CVD). Dry etching of 50 mu m wide contact windows was carried out using a contact stainless steel stencil mask, after unloading the wafer from the RT-LPMOCVD reactor chamber via the load-lock and loading it into an electron cyclotron resonance (ECR) dry etching chamber. In the final step the wafer was returned through the load-lock to the main chamber and a TiNx layer was selectively deposited into the via-holes and processed to provide an ohmic contact to the InGaAs/InP substrate. This work provides a solid demonstration of the feasibility of the single-wafer integrated process (SWIP) as an approach to replace the batch process traditionally used for InP-based optoelectronic devices." @default.
- W2019827436 created "2016-06-24" @default.
- W2019827436 creator A5063434010 @default.
- W2019827436 creator A5068212478 @default.
- W2019827436 creator A5085381025 @default.
- W2019827436 date "1992-03-01" @default.
- W2019827436 modified "2023-09-25" @default.
- W2019827436 title "Formation of TiNxohmic contacts to InGaAs/InP by means of a load-locked integrated process" @default.
- W2019827436 cites W1972414998 @default.
- W2019827436 cites W2012582669 @default.
- W2019827436 cites W2060114757 @default.
- W2019827436 cites W2070928426 @default.
- W2019827436 cites W2080486149 @default.
- W2019827436 cites W2087819105 @default.
- W2019827436 cites W2021015881 @default.
- W2019827436 doi "https://doi.org/10.1088/0268-1242/7/3/029" @default.
- W2019827436 hasPublicationYear "1992" @default.
- W2019827436 type Work @default.
- W2019827436 sameAs 2019827436 @default.
- W2019827436 citedByCount "7" @default.
- W2019827436 crossrefType "journal-article" @default.
- W2019827436 hasAuthorship W2019827436A5063434010 @default.
- W2019827436 hasAuthorship W2019827436A5068212478 @default.
- W2019827436 hasAuthorship W2019827436A5085381025 @default.
- W2019827436 hasConcept C111919701 @default.
- W2019827436 hasConcept C185592680 @default.
- W2019827436 hasConcept C192562407 @default.
- W2019827436 hasConcept C41008148 @default.
- W2019827436 hasConcept C49040817 @default.
- W2019827436 hasConcept C98045186 @default.
- W2019827436 hasConceptScore W2019827436C111919701 @default.
- W2019827436 hasConceptScore W2019827436C185592680 @default.
- W2019827436 hasConceptScore W2019827436C192562407 @default.
- W2019827436 hasConceptScore W2019827436C41008148 @default.
- W2019827436 hasConceptScore W2019827436C49040817 @default.
- W2019827436 hasConceptScore W2019827436C98045186 @default.
- W2019827436 hasIssue "3" @default.
- W2019827436 hasLocation W20198274361 @default.
- W2019827436 hasOpenAccess W2019827436 @default.
- W2019827436 hasPrimaryLocation W20198274361 @default.
- W2019827436 hasRelatedWork W2058676402 @default.
- W2019827436 hasRelatedWork W2059363835 @default.
- W2019827436 hasRelatedWork W2139871202 @default.
- W2019827436 hasRelatedWork W2292675962 @default.
- W2019827436 hasRelatedWork W2329285141 @default.
- W2019827436 hasRelatedWork W2399397734 @default.
- W2019827436 hasRelatedWork W2899084033 @default.
- W2019827436 hasRelatedWork W2902546961 @default.
- W2019827436 hasRelatedWork W3127524829 @default.
- W2019827436 hasRelatedWork W4313653414 @default.
- W2019827436 hasVolume "7" @default.
- W2019827436 isParatext "false" @default.
- W2019827436 isRetracted "false" @default.
- W2019827436 magId "2019827436" @default.
- W2019827436 workType "article" @default.