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• W2019854663 abstract "A microelectromechanical systems (MEMS) deformable mirror is described that uses a novel actuation scheme to increase the optical focus range. In this method, electrostatic-pneumatic actuation is used to achieve a convex surface curvature of the mirror with negative focus, while direct electrostatic actuation creates a concave surface with positive focus. Mirrors have demonstrated 20-μm total stroke with more than 2-kHz bandwidth. The fabricated device consists of two membranes made of the photoset epoxy SU-8. One membrane serves as the deformable mirror and the other one as the pneumatic actuator. The pneumatic membrane also provides a built-in valve for pressure equalization. The principle of operation, fabrication process, and results are presented." @default.
• W2019854663 created "2016-06-24" @default.
• W2019854663 creator A5000239939 @default.
• W2019854663 creator A5045481613 @default.
• W2019854663 date "2015-06-01" @default.
• W2019854663 modified "2023-10-17" @default.
• W2019854663 title "Electrostatic-Pneumatic Membrane Mirror With Positive or Negative Variable Optical Power" @default.
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• W2019854663 doi "https://doi.org/10.1109/jmems.2014.2346758" @default.
• W2019854663 hasPublicationYear "2015" @default.
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