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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2019883622> ?p ?o ?g. }

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• W2019883622 abstract "The production of highly porous films by oblique deposition has attracted recent attention because of the possible applications of such films. The morphology of obliquely evaporated films is thought to be determined mainly by the mechanisms of self-shadowing and surface diffusion. The thin film process simulator GROFILMS has been used to verify the importance of these effects, and clarify some aspects of how they interact to determine the final film morphology. Good agreement between simulations and actual films has been achieved. Temperature control of the film during deposition is shown to be an important consideration for the production of structurally engineered films." @default.
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• W2019883622 date "1999-02-01" @default.
• W2019883622 modified "2023-09-27" @default.
• W2019883622 title "Self-shadowing and surface diffusion effects in obliquely deposited thin films" @default.
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• W2019883622 doi "https://doi.org/10.1016/s0040-6090(98)01154-7" @default.
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