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- W2019904326 abstract "A low dielectric constant polyarylether (PAE) polymer was investigated for resistance to copper drift. Positive bias-temperature stressing (BTS) of metal/PAE/SiO2/Si capacitors led to large initial flat-band voltage shifts toward the left-hand side in the capacitance–voltage curve for all gate metals investigated (Pt, Al, and Cu). Upon triangular voltage sweep (TVS) testing, Pt/PAE/SiO2/Si capacitors exhibited no peak, whereas a single peak (indicative of mobile ions) was seen for Cu/PAE/SiO2/Si capacitors. The results indicate that an intrinsic polymer instability source, such as polarization (under bias), was the major cause for the BTS instability of the polymer. From TVS studies, Cu+ ion drift could be characterized in the temperature range of 150–250 °C, and mobility of Cu+ in PAE was extracted from Hillen’s analysis. A combination of BTS and TVS techniques is thus more useful for characterization of copper drift, and helps to resolve the intrinsic polymer effect from that of metal drift-related instability." @default.
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- W2019904326 date "2004-01-20" @default.
- W2019904326 modified "2023-09-27" @default.
- W2019904326 title "Separation of copper ion-induced and intrinsic polymer instabilities in polyarylether using triangular voltage sweep" @default.
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- W2019904326 doi "https://doi.org/10.1063/1.1636256" @default.
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