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• W2019910330 endingPage "373" @default.
• W2019910330 startingPage "369" @default.
• W2019910330 abstract "Mobility and stability in bottom-gate microcrystalline silicon TFTs with the active layer deposited at 200 °C by PECVD from SiF4/Ar/H2 mixtures have been studied. For fixed deposition conditions, the plasma treatment of the silicon nitride appears to be the key parameter which allows control of the density of sticking sites and thus achievement of lateral growth. This leads to large columns and improved mobility of the TFTs. However, the reduction of the density of sticking sites also favors the damage of the silicon nitride and eventually leads to deterioration of the stability of the devices." @default.
• W2019910330 created "2016-06-24" @default.
• W2019910330 creator A5005646321 @default.
• W2019910330 creator A5009669044 @default.
• W2019910330 creator A5023641896 @default.
• W2019910330 creator A5040843538 @default.
• W2019910330 creator A5074560940 @default.
• W2019910330 creator A5090015400 @default.
• W2019910330 date "2004-06-01" @default.
• W2019910330 modified "2023-09-30" @default.
• W2019910330 title "Effects of grain size and plasma-induced modification of the dielectric on the mobility and stability of bottom gate microcrystalline silicon TFTs" @default.
• W2019910330 cites W1966295272 @default.
• W2019910330 cites W1983824097 @default.
• W2019910330 cites W1997447020 @default.
• W2019910330 cites W1999904225 @default.
• W2019910330 cites W2014096650 @default.
• W2019910330 cites W2039605161 @default.
• W2019910330 cites W2046414193 @default.
• W2019910330 cites W2052153456 @default.
• W2019910330 cites W2063622053 @default.
• W2019910330 cites W2140799174 @default.
• W2019910330 doi "https://doi.org/10.1016/j.jnoncrysol.2004.02.076" @default.
• W2019910330 hasPublicationYear "2004" @default.
• W2019910330 type Work @default.
• W2019910330 sameAs 2019910330 @default.
• W2019910330 citedByCount "15" @default.
• W2019910330 countsByYear W20199103302012 @default.
• W2019910330 countsByYear W20199103302013 @default.
• W2019910330 countsByYear W20199103302014 @default.
• W2019910330 countsByYear W20199103302015 @default.
• W2019910330 countsByYear W20199103302016 @default.
• W2019910330 countsByYear W20199103302022 @default.
• W2019910330 countsByYear W20199103302023 @default.
• W2019910330 crossrefType "journal-article" @default.
• W2019910330 hasAuthorship W2019910330A5005646321 @default.
• W2019910330 hasAuthorship W2019910330A5009669044 @default.
• W2019910330 hasAuthorship W2019910330A5023641896 @default.
• W2019910330 hasAuthorship W2019910330A5040843538 @default.
• W2019910330 hasAuthorship W2019910330A5074560940 @default.
• W2019910330 hasAuthorship W2019910330A5090015400 @default.
• W2019910330 hasConcept C119599485 @default.
• W2019910330 hasConcept C121332964 @default.
• W2019910330 hasConcept C127413603 @default.
• W2019910330 hasConcept C133386390 @default.
• W2019910330 hasConcept C165801399 @default.
• W2019910330 hasConcept C166972891 @default.
• W2019910330 hasConcept C171250308 @default.
• W2019910330 hasConcept C172385210 @default.
• W2019910330 hasConcept C185592680 @default.
• W2019910330 hasConcept C192562407 @default.
• W2019910330 hasConcept C194760766 @default.
• W2019910330 hasConcept C201370411 @default.
• W2019910330 hasConcept C2776390347 @default.
• W2019910330 hasConcept C2777431650 @default.
• W2019910330 hasConcept C2779227376 @default.
• W2019910330 hasConcept C2779667780 @default.
• W2019910330 hasConcept C2993184922 @default.
• W2019910330 hasConcept C38347018 @default.
• W2019910330 hasConcept C49040817 @default.
• W2019910330 hasConcept C544956773 @default.
• W2019910330 hasConcept C62520636 @default.
• W2019910330 hasConcept C80086925 @default.
• W2019910330 hasConcept C8010536 @default.
• W2019910330 hasConcept C82706917 @default.
• W2019910330 hasConcept C87359718 @default.
• W2019910330 hasConceptScore W2019910330C119599485 @default.
• W2019910330 hasConceptScore W2019910330C121332964 @default.
• W2019910330 hasConceptScore W2019910330C127413603 @default.
• W2019910330 hasConceptScore W2019910330C133386390 @default.
• W2019910330 hasConceptScore W2019910330C165801399 @default.
• W2019910330 hasConceptScore W2019910330C166972891 @default.
• W2019910330 hasConceptScore W2019910330C171250308 @default.
• W2019910330 hasConceptScore W2019910330C172385210 @default.
• W2019910330 hasConceptScore W2019910330C185592680 @default.
• W2019910330 hasConceptScore W2019910330C192562407 @default.
• W2019910330 hasConceptScore W2019910330C194760766 @default.
• W2019910330 hasConceptScore W2019910330C201370411 @default.
• W2019910330 hasConceptScore W2019910330C2776390347 @default.
• W2019910330 hasConceptScore W2019910330C2777431650 @default.
• W2019910330 hasConceptScore W2019910330C2779227376 @default.
• W2019910330 hasConceptScore W2019910330C2779667780 @default.
• W2019910330 hasConceptScore W2019910330C2993184922 @default.
• W2019910330 hasConceptScore W2019910330C38347018 @default.
• W2019910330 hasConceptScore W2019910330C49040817 @default.
• W2019910330 hasConceptScore W2019910330C544956773 @default.
• W2019910330 hasConceptScore W2019910330C62520636 @default.
• W2019910330 hasConceptScore W2019910330C80086925 @default.
• W2019910330 hasConceptScore W2019910330C8010536 @default.
• W2019910330 hasConceptScore W2019910330C82706917 @default.
• W2019910330 hasConceptScore W2019910330C87359718 @default.
• W2019910330 hasLocation W20199103301 @default.
• W2019910330 hasOpenAccess W2019910330 @default.
• W2019910330 hasPrimaryLocation W20199103301 @default.
• W2019910330 hasRelatedWork W1878612040 @default.
• W2019910330 hasRelatedWork W1983513864 @default.
• W2019910330 hasRelatedWork W1994971657 @default.
• W2019910330 hasRelatedWork W2019910330 @default.
• W2019910330 hasRelatedWork W2042664939 @default.

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