Matches in SemOpenAlex for { <https://semopenalex.org/work/W2019912016> ?p ?o ?g. }
- W2019912016 endingPage "D3087" @default.
- W2019912016 startingPage "D3081" @default.
- W2019912016 abstract "Cu electrodeposition and superfilling in the presence of organic additives have been widely researched. Nowadays, the reduction of interconnection dimensions raises issues, such as the reduction of electrical property and the difficulty of superfilling narrow features. Superfilling results from the competitive adsorption of organic additives, and the changes in their surface coverage. Therefore, modification of the adsorption state can improve the superfilling performance. Since anodic potential is applied during the pulse-reverse electrodeposition, it has the potential to considerably affect the adsorption of organic additives. In this research, the impacts of process parameters of pulse-reverse electrodeposition, such as deposition/anodic potentials and anodic time, on the competitive adsorption between PEG-Cl− and SPS are studied. It is confirmed that the anodic step promotes the displacement of PEG-Cl− by SPS at the early stage of electrodeposition, and it is intensified with more positive potential and longer anodic time." @default.
- W2019912016 created "2016-06-24" @default.
- W2019912016 creator A5006634799 @default.
- W2019912016 creator A5038504015 @default.
- W2019912016 creator A5051642325 @default.
- W2019912016 creator A5071916720 @default.
- W2019912016 creator A5089500608 @default.
- W2019912016 date "2013-01-01" @default.
- W2019912016 modified "2023-10-07" @default.
- W2019912016 title "Pulse-Reverse Electrodeposition of Cu for the Fabrication of Metal Interconnection" @default.
- W2019912016 cites W1512738455 @default.
- W2019912016 cites W1578723510 @default.
- W2019912016 cites W1756056523 @default.
- W2019912016 cites W1870339968 @default.
- W2019912016 cites W1970763152 @default.
- W2019912016 cites W1975395897 @default.
- W2019912016 cites W1982697565 @default.
- W2019912016 cites W1982857787 @default.
- W2019912016 cites W1986010280 @default.
- W2019912016 cites W2002992373 @default.
- W2019912016 cites W2013779936 @default.
- W2019912016 cites W2027884340 @default.
- W2019912016 cites W2031332021 @default.
- W2019912016 cites W2034985658 @default.
- W2019912016 cites W2036831374 @default.
- W2019912016 cites W2040028885 @default.
- W2019912016 cites W2047573132 @default.
- W2019912016 cites W2062933679 @default.
- W2019912016 cites W2072071787 @default.
- W2019912016 cites W2079716905 @default.
- W2019912016 cites W2082861151 @default.
- W2019912016 cites W2083247518 @default.
- W2019912016 cites W2087733857 @default.
- W2019912016 cites W2088027246 @default.
- W2019912016 cites W2088888886 @default.
- W2019912016 cites W2094727110 @default.
- W2019912016 cites W2098146162 @default.
- W2019912016 cites W2102727575 @default.
- W2019912016 cites W2105299086 @default.
- W2019912016 cites W2112007920 @default.
- W2019912016 cites W2113238227 @default.
- W2019912016 cites W2115587726 @default.
- W2019912016 cites W2125623767 @default.
- W2019912016 cites W2127154765 @default.
- W2019912016 cites W2132545637 @default.
- W2019912016 cites W2143485111 @default.
- W2019912016 cites W2153287522 @default.
- W2019912016 cites W2157518753 @default.
- W2019912016 cites W2171955786 @default.
- W2019912016 cites W2315207398 @default.
- W2019912016 cites W2321606169 @default.
- W2019912016 cites W3162127202 @default.
- W2019912016 doi "https://doi.org/10.1149/2.015312jes" @default.
- W2019912016 hasPublicationYear "2013" @default.
- W2019912016 type Work @default.
- W2019912016 sameAs 2019912016 @default.
- W2019912016 citedByCount "17" @default.
- W2019912016 countsByYear W20199120162013 @default.
- W2019912016 countsByYear W20199120162014 @default.
- W2019912016 countsByYear W20199120162015 @default.
- W2019912016 countsByYear W20199120162016 @default.
- W2019912016 countsByYear W20199120162018 @default.
- W2019912016 countsByYear W20199120162020 @default.
- W2019912016 countsByYear W20199120162022 @default.
- W2019912016 crossrefType "journal-article" @default.
- W2019912016 hasAuthorship W2019912016A5006634799 @default.
- W2019912016 hasAuthorship W2019912016A5038504015 @default.
- W2019912016 hasAuthorship W2019912016A5051642325 @default.
- W2019912016 hasAuthorship W2019912016A5071916720 @default.
- W2019912016 hasAuthorship W2019912016A5089500608 @default.
- W2019912016 hasConcept C123745756 @default.
- W2019912016 hasConcept C127413603 @default.
- W2019912016 hasConcept C136525101 @default.
- W2019912016 hasConcept C142724271 @default.
- W2019912016 hasConcept C147789679 @default.
- W2019912016 hasConcept C150394285 @default.
- W2019912016 hasConcept C151730666 @default.
- W2019912016 hasConcept C171250308 @default.
- W2019912016 hasConcept C17525397 @default.
- W2019912016 hasConcept C178790620 @default.
- W2019912016 hasConcept C179104552 @default.
- W2019912016 hasConcept C185592680 @default.
- W2019912016 hasConcept C191897082 @default.
- W2019912016 hasConcept C192562407 @default.
- W2019912016 hasConcept C204787440 @default.
- W2019912016 hasConcept C2816523 @default.
- W2019912016 hasConcept C31258907 @default.
- W2019912016 hasConcept C41008148 @default.
- W2019912016 hasConcept C42360764 @default.
- W2019912016 hasConcept C544153396 @default.
- W2019912016 hasConcept C544778455 @default.
- W2019912016 hasConcept C64297162 @default.
- W2019912016 hasConcept C71924100 @default.
- W2019912016 hasConcept C86803240 @default.
- W2019912016 hasConcept C89395315 @default.
- W2019912016 hasConceptScore W2019912016C123745756 @default.
- W2019912016 hasConceptScore W2019912016C127413603 @default.
- W2019912016 hasConceptScore W2019912016C136525101 @default.