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- W2019922252 endingPage "242" @default.
- W2019922252 startingPage "235" @default.
- W2019922252 abstract "SiO2 etching is done by using fluorocarbon gases to deposit a fluoropolymer on the underlying silicon. This deposit enhances the etching selectivity of SiO2 over silicon or silicon nitride. CF2 radicals are used as the main gas precursor for polymer deposition. In a conventional gas plasma, however, the CF2 radicals and other radicals (high-molecular-weight radicals: CxFy) lead to polymerization. This condition causes microloading and etching-stop in high-aspect contact-hole patterning due to the sidewall polymerization during SiO2 etching processes. Conversely, by using new fluorocarbon gas chemistries (C2F4/CF3I), we achieved selective radical generation of CF2 and eliminated high-molecular-weight radicals. Under this condition, microloading-free and etching-stop-free high-aspect-ratio contact-hole patterning of SiO2 was accomplished. Thus, the higher molecular weight radicals play an important role in the sidewall polymerization in contact holes because these radicals have a higher sticking coefficient than CF2 radicals. Selective generation of CF2 radicals and suppression of CxFy radicals are thus necessary to eliminate microloading and etching-stop in the formation of high-aspect-ratio contact holes." @default.
- W2019922252 created "2016-06-24" @default.
- W2019922252 creator A5019677533 @default.
- W2019922252 creator A5084880356 @default.
- W2019922252 date "2000-10-01" @default.
- W2019922252 modified "2023-10-16" @default.
- W2019922252 title "Effects of low-molecular-weight radicals for reduction of microloading in high-aspect contact-hole etching" @default.
- W2019922252 cites W1482583869 @default.
- W2019922252 cites W1499265219 @default.
- W2019922252 cites W1851403814 @default.
- W2019922252 cites W1971843690 @default.
- W2019922252 cites W1986778842 @default.
- W2019922252 cites W1991109037 @default.
- W2019922252 cites W1991732743 @default.
- W2019922252 cites W1993248329 @default.
- W2019922252 cites W2009824904 @default.
- W2019922252 cites W2025846573 @default.
- W2019922252 cites W2029817924 @default.
- W2019922252 cites W2037020804 @default.
- W2019922252 cites W2048185184 @default.
- W2019922252 cites W2072347177 @default.
- W2019922252 cites W2073387142 @default.
- W2019922252 cites W2078172519 @default.
- W2019922252 cites W2079291631 @default.
- W2019922252 cites W2097044588 @default.
- W2019922252 cites W4230387490 @default.
- W2019922252 doi "https://doi.org/10.1016/s0040-6090(00)01155-x" @default.
- W2019922252 hasPublicationYear "2000" @default.
- W2019922252 type Work @default.
- W2019922252 sameAs 2019922252 @default.
- W2019922252 citedByCount "17" @default.
- W2019922252 countsByYear W20199222522014 @default.
- W2019922252 countsByYear W20199222522015 @default.
- W2019922252 crossrefType "journal-article" @default.
- W2019922252 hasAuthorship W2019922252A5019677533 @default.
- W2019922252 hasAuthorship W2019922252A5084880356 @default.
- W2019922252 hasConcept C100460472 @default.
- W2019922252 hasConcept C107187091 @default.
- W2019922252 hasConcept C127413603 @default.
- W2019922252 hasConcept C139066938 @default.
- W2019922252 hasConcept C150394285 @default.
- W2019922252 hasConcept C159985019 @default.
- W2019922252 hasConcept C162711632 @default.
- W2019922252 hasConcept C178790620 @default.
- W2019922252 hasConcept C185592680 @default.
- W2019922252 hasConcept C188027245 @default.
- W2019922252 hasConcept C192562407 @default.
- W2019922252 hasConcept C2776875633 @default.
- W2019922252 hasConcept C2779227376 @default.
- W2019922252 hasConcept C2780708225 @default.
- W2019922252 hasConcept C42360764 @default.
- W2019922252 hasConcept C44228677 @default.
- W2019922252 hasConcept C521977710 @default.
- W2019922252 hasConcept C544956773 @default.
- W2019922252 hasConcept C6556556 @default.
- W2019922252 hasConcept C75473681 @default.
- W2019922252 hasConcept C9950777 @default.
- W2019922252 hasConceptScore W2019922252C100460472 @default.
- W2019922252 hasConceptScore W2019922252C107187091 @default.
- W2019922252 hasConceptScore W2019922252C127413603 @default.
- W2019922252 hasConceptScore W2019922252C139066938 @default.
- W2019922252 hasConceptScore W2019922252C150394285 @default.
- W2019922252 hasConceptScore W2019922252C159985019 @default.
- W2019922252 hasConceptScore W2019922252C162711632 @default.
- W2019922252 hasConceptScore W2019922252C178790620 @default.
- W2019922252 hasConceptScore W2019922252C185592680 @default.
- W2019922252 hasConceptScore W2019922252C188027245 @default.
- W2019922252 hasConceptScore W2019922252C192562407 @default.
- W2019922252 hasConceptScore W2019922252C2776875633 @default.
- W2019922252 hasConceptScore W2019922252C2779227376 @default.
- W2019922252 hasConceptScore W2019922252C2780708225 @default.
- W2019922252 hasConceptScore W2019922252C42360764 @default.
- W2019922252 hasConceptScore W2019922252C44228677 @default.
- W2019922252 hasConceptScore W2019922252C521977710 @default.
- W2019922252 hasConceptScore W2019922252C544956773 @default.
- W2019922252 hasConceptScore W2019922252C6556556 @default.
- W2019922252 hasConceptScore W2019922252C75473681 @default.
- W2019922252 hasConceptScore W2019922252C9950777 @default.
- W2019922252 hasIssue "2" @default.
- W2019922252 hasLocation W20199222521 @default.
- W2019922252 hasOpenAccess W2019922252 @default.
- W2019922252 hasPrimaryLocation W20199222521 @default.
- W2019922252 hasRelatedWork W1978362497 @default.
- W2019922252 hasRelatedWork W1979745557 @default.
- W2019922252 hasRelatedWork W2014730931 @default.
- W2019922252 hasRelatedWork W2021799329 @default.
- W2019922252 hasRelatedWork W2112756418 @default.
- W2019922252 hasRelatedWork W2356917282 @default.
- W2019922252 hasRelatedWork W3137573909 @default.
- W2019922252 hasRelatedWork W3170952105 @default.
- W2019922252 hasRelatedWork W3195954465 @default.
- W2019922252 hasRelatedWork W2994558433 @default.
- W2019922252 hasVolume "374" @default.
- W2019922252 isParatext "false" @default.
- W2019922252 isRetracted "false" @default.
- W2019922252 magId "2019922252" @default.
- W2019922252 workType "article" @default.