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- W2019922581 abstract "We are attempting to develop a shape memory alloy (SMA) actuated micropump as a component for use in micro analysis or micro dosage systems. In this paper, we will discuss the fabrication process and dynamic actuation properties of an SMA actuator. TiNi thin film of about 6 micrometers in thickness was deposited onto a Si wafer with a square recess on its reverse side, and annealed at 500 degrees C for 1h in a vacuum to memorize an initial flat shape. The TiNi thin film and a Pyrex glass cap of 500 micrometers thickness with a square recess were then anodically bonded together in a vacuum to form a chamber to which a bias pressure was to be applied to deform the TiNi thin film. After removing the remaining 50 $mUm thick Si layer beneath the TiNi thin film by RIE in SF<SUB>6</SUB> plasma, a shape memory diaphragm of 5mm square in size was completed. The fabricated actuator was driven by resistive heating and air-cooling under a bias pressure of 200 kPa, which was applied by a nitrogen gas flow through a small hole pieced in the Pyrex glass cap. Under these conditions, the actuator gave displacements of about 95 micrometers at the center during repeated thermal cycles. A Si check valve structure, to be assembled with the actuator to construct a micropump, was also fabricated through a process of anisotropic etching and fusion bonding. The flow resistance for forward flow proved to be about one-three hundredths of that for backward flow." @default.
- W2019922581 created "2016-06-24" @default.
- W2019922581 creator A5001830605 @default.
- W2019922581 creator A5026762738 @default.
- W2019922581 creator A5027968179 @default.
- W2019922581 date "1999-09-29" @default.
- W2019922581 modified "2023-09-23" @default.
- W2019922581 title "<title>Fabrication of TiNi shape memory actuator for micropump</title>" @default.
- W2019922581 cites W1972258150 @default.
- W2019922581 cites W1975142203 @default.
- W2019922581 cites W2001475255 @default.
- W2019922581 cites W2001896868 @default.
- W2019922581 cites W2006951808 @default.
- W2019922581 cites W2019014472 @default.
- W2019922581 cites W2035261140 @default.
- W2019922581 cites W2049178095 @default.
- W2019922581 cites W2055904158 @default.
- W2019922581 cites W2103004892 @default.
- W2019922581 cites W2130587487 @default.
- W2019922581 cites W2140699407 @default.
- W2019922581 cites W2151192676 @default.
- W2019922581 cites W2537585751 @default.
- W2019922581 doi "https://doi.org/10.1117/12.364458" @default.
- W2019922581 hasPublicationYear "1999" @default.
- W2019922581 type Work @default.
- W2019922581 sameAs 2019922581 @default.
- W2019922581 citedByCount "1" @default.
- W2019922581 crossrefType "proceedings-article" @default.
- W2019922581 hasAuthorship W2019922581A5001830605 @default.
- W2019922581 hasAuthorship W2019922581A5026762738 @default.
- W2019922581 hasAuthorship W2019922581A5027968179 @default.
- W2019922581 hasConcept C100460472 @default.
- W2019922581 hasConcept C119599485 @default.
- W2019922581 hasConcept C127413603 @default.
- W2019922581 hasConcept C136525101 @default.
- W2019922581 hasConcept C142724271 @default.
- W2019922581 hasConcept C157138929 @default.
- W2019922581 hasConcept C159985019 @default.
- W2019922581 hasConcept C160671074 @default.
- W2019922581 hasConcept C164292776 @default.
- W2019922581 hasConcept C171250308 @default.
- W2019922581 hasConcept C172707124 @default.
- W2019922581 hasConcept C192562407 @default.
- W2019922581 hasConcept C204787440 @default.
- W2019922581 hasConcept C2779227376 @default.
- W2019922581 hasConcept C49040817 @default.
- W2019922581 hasConcept C49097943 @default.
- W2019922581 hasConcept C71924100 @default.
- W2019922581 hasConcept C76272257 @default.
- W2019922581 hasConcept C78519656 @default.
- W2019922581 hasConceptScore W2019922581C100460472 @default.
- W2019922581 hasConceptScore W2019922581C119599485 @default.
- W2019922581 hasConceptScore W2019922581C127413603 @default.
- W2019922581 hasConceptScore W2019922581C136525101 @default.
- W2019922581 hasConceptScore W2019922581C142724271 @default.
- W2019922581 hasConceptScore W2019922581C157138929 @default.
- W2019922581 hasConceptScore W2019922581C159985019 @default.
- W2019922581 hasConceptScore W2019922581C160671074 @default.
- W2019922581 hasConceptScore W2019922581C164292776 @default.
- W2019922581 hasConceptScore W2019922581C171250308 @default.
- W2019922581 hasConceptScore W2019922581C172707124 @default.
- W2019922581 hasConceptScore W2019922581C192562407 @default.
- W2019922581 hasConceptScore W2019922581C204787440 @default.
- W2019922581 hasConceptScore W2019922581C2779227376 @default.
- W2019922581 hasConceptScore W2019922581C49040817 @default.
- W2019922581 hasConceptScore W2019922581C49097943 @default.
- W2019922581 hasConceptScore W2019922581C71924100 @default.
- W2019922581 hasConceptScore W2019922581C76272257 @default.
- W2019922581 hasConceptScore W2019922581C78519656 @default.
- W2019922581 hasLocation W20199225811 @default.
- W2019922581 hasOpenAccess W2019922581 @default.
- W2019922581 hasPrimaryLocation W20199225811 @default.
- W2019922581 hasRelatedWork W2041063316 @default.
- W2019922581 hasRelatedWork W2091036922 @default.
- W2019922581 hasRelatedWork W2147977411 @default.
- W2019922581 hasRelatedWork W2172236891 @default.
- W2019922581 hasRelatedWork W2315337917 @default.
- W2019922581 hasRelatedWork W2358466158 @default.
- W2019922581 hasRelatedWork W2907722335 @default.
- W2019922581 hasRelatedWork W3191589816 @default.
- W2019922581 hasRelatedWork W3196783721 @default.
- W2019922581 hasRelatedWork W1740701373 @default.
- W2019922581 isParatext "false" @default.
- W2019922581 isRetracted "false" @default.
- W2019922581 magId "2019922581" @default.
- W2019922581 workType "article" @default.