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- W2019929429 abstract "Nanoscale tip apexes of conducting cantilever probes are important enablers for several conducting probe technologies that require reliable long-term operation, while preserving the nanoscale integrity of the tip apex. In this paper, the concept of an encapsulated tip with a nanoscale conducting core is presented. A method to fabricate such tips on conducting silicon microcantilevers is described. Long-term conduction and wear reliability of these nanoscale tips are evaluated systematically, and their ability to operate for sliding distances greater than 2 m in conduction and 11 m in wear on amorphous carbon is demonstrated. These results are expected to have an impact on the future of conducting probe-based technologies such as probe-based nanometrology, data storage and nanolithography." @default.
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- W2019929429 date "2009-02-17" @default.
- W2019929429 modified "2023-09-25" @default.
- W2019929429 title "Encapsulated tips for reliable nanoscale conduction in scanning probe technologies" @default.
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- W2019929429 doi "https://doi.org/10.1088/0957-4484/20/10/105701" @default.
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