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- W2019932500 abstract "Mechanical stresses on two types of a-SiGe:H films prepared from (SiH4GeH4) and from (Si2H6GeH4) are compared. We observed some correlation between the magnitude of stresses and the light induced degradation in these films. Comparing IR spectra in these films, it was found that the sign and magnitude of stress has a strong dependence on the chemical bonding structure between Si and H." @default.
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- W2019932500 date "1985-12-01" @default.
- W2019932500 modified "2023-10-16" @default.
- W2019932500 title "Photo induced effects on a-Si1−xGex:H films" @default.
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- W2019932500 doi "https://doi.org/10.1016/0022-3093(85)90689-1" @default.
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