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- W2019936248 abstract "By exposure to an atom beam, polycrystal deposition on mask films (W and SiO 2 ) was suppressed in the selective epitaxial growth of GaAs by metalorganic chemical vapor deposition (MOCVD) under atmospheric pressure. While surface migration was enhanced on W surfaces, reevaporation was enhanced on SiO 2 surfaces by atom beam irradiation. By optimizing growth conditions, selective epitaxial growth was realized without polycrystal deposition on stripe-shaped masks where the maximum width of the stripe was 40 µm for W masks and 150 µm for SiO 2 masks." @default.
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- W2019936248 title "Atom Beam-Irradiation Effects on Selective Epitaxial Growth of GaAs by Metalorganic Chemical Vapor Deposition" @default.
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- W2019936248 doi "https://doi.org/10.1143/jjap.28.l1489" @default.
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