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- W2019945536 abstract "Previously, we have reported the science and technology of micromachiend valves and orifices, and their integration to form high-performance mass-flow controllers (MFCs), and vacuum leak rate shut-off devices (SOVs). In this work, we expand the science and technology base of these devices, to include not only performance, but more practical aspects of their behavior. Specifically, for MFCs we have studied long-term drift, mean time tofail, particle generation, dry down after moisture contamination, gas replacement, effects of gravitational orientation, and sensitivity to inlet pressure and ambient temperature. For SOVs, we have studied mean time to fail, particle generation, dry down after moisture contamination, vacuum leak rate, and sensitivity to inlet pressure and ambient temperature." @default.
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- W2019945536 date "2000-08-18" @default.
- W2019945536 modified "2023-09-26" @default.
- W2019945536 title "<title>Practical aspects of micromachined gas distribution systems for semiconductor processing</title>" @default.
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- W2019945536 doi "https://doi.org/10.1117/12.395668" @default.
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