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- W2019955475 abstract "A planar bidirectional valveless peristaltic micropump for controlling biological sample fluids was designed with a very simple structure and fabricated employing MEMS technologies including deep reactive ion etching (DRIE) process in silicon, chemomechanical polishing (CMP), and silicon–glass anodic bonding. The proposed micropump was able to control the flow bidirectionally at the rate of ∼12 μl/min (20 nl/stroke) for water and ∼60 μl/min (100 nl/stroke) for air with an operation frequency of 10 Hz at a voltage of 120 Vpp. Actuation modeling of the PZT-glass actuator was performed using the CoventorWare, and the simulation results agreed well with the experimental measurements. In addition, the fabricated micropump was used in the setup for flow-type analysis and was found adequate in the electrochemical immunosensing by biocatalyzed precipitation." @default.
- W2019955475 created "2016-06-24" @default.
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- W2019955475 date "2004-09-01" @default.
- W2019955475 modified "2023-10-18" @default.
- W2019955475 title "Fabrication and characterization of a bidirectional valveless peristaltic micropump and its application to a flow-type immunoanalysis" @default.
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- W2019955475 doi "https://doi.org/10.1016/j.snb.2004.04.081" @default.
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