FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2019955868> ?p ?o ?g. }

• W2019955868 abstract "We prepared boron-doped Si/Si0.8Ge0.2 (Si:B/SiGe) multilayers sputter-deposited on quartz glass substrates, and investigated their structural and thermoelectric properties. These samples were processed by using conventional whole-layer annealing and layer-by-layer annealing methods. Si:B/SiGe multilayer samples annealed layer-by-layer showed good periodicity with well-defined interfaces as compared with conventionally annealed samples (whole-layer annealing). However, Ge diffusion was observed at the interfaces near substrates since the SiGe layer near the substrates suffered a longer integrated annealing time during the layer-by-layer annealing process. It was found that the Si:B/SiGe multilayer annealed layer-by-layer showed thermally stable thermoelectric properties in a wide temperature range from 50 to 800 °C. The present experiment proved that the layer-by-layer-annealing method is an effective way of achieving stable and reliable thermoelectric properties in Si:B/SiGe multilayer micro-thermoelectric devices." @default.
• W2019955868 created "2016-06-24" @default.
• W2019955868 creator A5019331251 @default.
• W2019955868 creator A5024728373 @default.
• W2019955868 creator A5049012238 @default.
• W2019955868 creator A5058319879 @default.
• W2019955868 creator A5068810974 @default.
• W2019955868 date "2014-07-22" @default.
• W2019955868 modified "2023-09-26" @default.
• W2019955868 title "Preparation of thermoelectric Si:B/SiGe multilayer structures on quartz glasses by RF-magnetron sputtering with layer-by-layer annealing methods" @default.
• W2019955868 cites W1657113410 @default.
• W2019955868 cites W1966988921 @default.
• W2019955868 cites W1969752168 @default.
• W2019955868 cites W1970352650 @default.
• W2019955868 cites W1976652961 @default.
• W2019955868 cites W1976822956 @default.
• W2019955868 cites W1992335770 @default.
• W2019955868 cites W1993447019 @default.
• W2019955868 cites W1996405188 @default.
• W2019955868 cites W1999797996 @default.
• W2019955868 cites W2008375944 @default.
• W2019955868 cites W2014948109 @default.
• W2019955868 cites W2018798737 @default.
• W2019955868 cites W2029082487 @default.
• W2019955868 cites W2042056247 @default.
• W2019955868 cites W2042070687 @default.
• W2019955868 cites W2043236926 @default.
• W2019955868 cites W2044755011 @default.
• W2019955868 cites W2045590530 @default.
• W2019955868 cites W2063568610 @default.
• W2019955868 cites W2093778976 @default.
• W2019955868 cites W2095492543 @default.
• W2019955868 cites W2095591915 @default.
• W2019955868 cites W2110663363 @default.
• W2019955868 cites W2138844603 @default.
• W2019955868 cites W2165140614 @default.
• W2019955868 cites W2798977091 @default.
• W2019955868 cites W2802044307 @default.
• W2019955868 doi "https://doi.org/10.7567/jjap.53.087102" @default.
• W2019955868 hasPublicationYear "2014" @default.
• W2019955868 type Work @default.
• W2019955868 sameAs 2019955868 @default.
• W2019955868 citedByCount "0" @default.
• W2019955868 crossrefType "journal-article" @default.
• W2019955868 hasAuthorship W2019955868A5019331251 @default.
• W2019955868 hasAuthorship W2019955868A5024728373 @default.
• W2019955868 hasAuthorship W2019955868A5049012238 @default.
• W2019955868 hasAuthorship W2019955868A5058319879 @default.
• W2019955868 hasAuthorship W2019955868A5068810974 @default.
• W2019955868 hasConcept C121332964 @default.
• W2019955868 hasConcept C159985019 @default.
• W2019955868 hasConcept C171250308 @default.
• W2019955868 hasConcept C19067145 @default.
• W2019955868 hasConcept C192562407 @default.
• W2019955868 hasConcept C22423302 @default.
• W2019955868 hasConcept C2777855556 @default.
• W2019955868 hasConcept C2779227376 @default.
• W2019955868 hasConcept C2779870107 @default.
• W2019955868 hasConcept C49040817 @default.
• W2019955868 hasConcept C61427134 @default.
• W2019955868 hasConcept C63024428 @default.
• W2019955868 hasConcept C97355855 @default.
• W2019955868 hasConceptScore W2019955868C121332964 @default.
• W2019955868 hasConceptScore W2019955868C159985019 @default.
• W2019955868 hasConceptScore W2019955868C171250308 @default.
• W2019955868 hasConceptScore W2019955868C19067145 @default.
• W2019955868 hasConceptScore W2019955868C192562407 @default.
• W2019955868 hasConceptScore W2019955868C22423302 @default.
• W2019955868 hasConceptScore W2019955868C2777855556 @default.
• W2019955868 hasConceptScore W2019955868C2779227376 @default.
• W2019955868 hasConceptScore W2019955868C2779870107 @default.
• W2019955868 hasConceptScore W2019955868C49040817 @default.
• W2019955868 hasConceptScore W2019955868C61427134 @default.
• W2019955868 hasConceptScore W2019955868C63024428 @default.
• W2019955868 hasConceptScore W2019955868C97355855 @default.
• W2019955868 hasLocation W20199558681 @default.
• W2019955868 hasOpenAccess W2019955868 @default.
• W2019955868 hasPrimaryLocation W20199558681 @default.
• W2019955868 hasRelatedWork W1968533343 @default.
• W2019955868 hasRelatedWork W1983047477 @default.
• W2019955868 hasRelatedWork W1995168414 @default.
• W2019955868 hasRelatedWork W2006070145 @default.
• W2019955868 hasRelatedWork W2012209376 @default.
• W2019955868 hasRelatedWork W2026680100 @default.
• W2019955868 hasRelatedWork W2028540312 @default.
• W2019955868 hasRelatedWork W2054728324 @default.
• W2019955868 hasRelatedWork W2060428808 @default.
• W2019955868 hasRelatedWork W2063459165 @default.
• W2019955868 hasRelatedWork W2069491208 @default.
• W2019955868 hasRelatedWork W2092216173 @default.
• W2019955868 hasRelatedWork W2290552551 @default.
• W2019955868 hasRelatedWork W2315827749 @default.
• W2019955868 hasRelatedWork W2559244324 @default.
• W2019955868 hasRelatedWork W2885014850 @default.
• W2019955868 hasRelatedWork W2896248356 @default.
• W2019955868 hasRelatedWork W3169457418 @default.
• W2019955868 hasRelatedWork W2611981582 @default.
• W2019955868 hasRelatedWork W2725969324 @default.
• W2019955868 isParatext "false" @default.
• W2019955868 isRetracted "false" @default.

• next