Matches in SemOpenAlex for { <https://semopenalex.org/work/W2019958712> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2019958712 abstract "Record area size of 0.039 μm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> for a functional 6T-SRAM cell has been successfully achieved with a novel Nano Injection Lithography (NIL) technique and dynamic V <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>dd</sub> regulator (DVR). The NIL technique is not only maskless for minimizing entry cost but also photoresist free to greatly enhance pattern resolution, down to 2 nm 3-sigma line width roughness, and without significant proximity effect. Devices with nanowire channels and full TiN single gate for both N- and P-MOS are demonstrated with short channel and simplified integration process. This work discloses a new way to explore 16 nm CMOS device and circuit design, and obtains early access to extreme CMOS scaling." @default.
- W2019958712 created "2016-06-24" @default.
- W2019958712 creator A5012172122 @default.
- W2019958712 creator A5015001085 @default.
- W2019958712 creator A5015931015 @default.
- W2019958712 creator A5019169216 @default.
- W2019958712 creator A5020708579 @default.
- W2019958712 creator A5028528912 @default.
- W2019958712 creator A5030806585 @default.
- W2019958712 creator A5034425383 @default.
- W2019958712 creator A5048215043 @default.
- W2019958712 creator A5058605789 @default.
- W2019958712 creator A5067217268 @default.
- W2019958712 creator A5084177477 @default.
- W2019958712 creator A5090680280 @default.
- W2019958712 date "2009-12-01" @default.
- W2019958712 modified "2023-09-25" @default.
- W2019958712 title "16nm functional 0.039µm<sup>2</sup> 6T-SRAM cell with nano injection lithography, nanowire channel, and full TiN gate" @default.
- W2019958712 cites W2050618589 @default.
- W2019958712 doi "https://doi.org/10.1109/iedm.2009.5424252" @default.
- W2019958712 hasPublicationYear "2009" @default.
- W2019958712 type Work @default.
- W2019958712 sameAs 2019958712 @default.
- W2019958712 citedByCount "5" @default.
- W2019958712 countsByYear W20199587122012 @default.
- W2019958712 countsByYear W20199587122014 @default.
- W2019958712 crossrefType "proceedings-article" @default.
- W2019958712 hasAuthorship W2019958712A5012172122 @default.
- W2019958712 hasAuthorship W2019958712A5015001085 @default.
- W2019958712 hasAuthorship W2019958712A5015931015 @default.
- W2019958712 hasAuthorship W2019958712A5019169216 @default.
- W2019958712 hasAuthorship W2019958712A5020708579 @default.
- W2019958712 hasAuthorship W2019958712A5028528912 @default.
- W2019958712 hasAuthorship W2019958712A5030806585 @default.
- W2019958712 hasAuthorship W2019958712A5034425383 @default.
- W2019958712 hasAuthorship W2019958712A5048215043 @default.
- W2019958712 hasAuthorship W2019958712A5058605789 @default.
- W2019958712 hasAuthorship W2019958712A5067217268 @default.
- W2019958712 hasAuthorship W2019958712A5084177477 @default.
- W2019958712 hasAuthorship W2019958712A5090680280 @default.
- W2019958712 hasConcept C127162648 @default.
- W2019958712 hasConcept C134406635 @default.
- W2019958712 hasConcept C171250308 @default.
- W2019958712 hasConcept C191897082 @default.
- W2019958712 hasConcept C192562407 @default.
- W2019958712 hasConcept C204223013 @default.
- W2019958712 hasConcept C2779227376 @default.
- W2019958712 hasConcept C41008148 @default.
- W2019958712 hasConcept C46362747 @default.
- W2019958712 hasConcept C49040817 @default.
- W2019958712 hasConcept C525849907 @default.
- W2019958712 hasConcept C53524968 @default.
- W2019958712 hasConcept C68043766 @default.
- W2019958712 hasConcept C74214498 @default.
- W2019958712 hasConcept C76155785 @default.
- W2019958712 hasConcept C9390403 @default.
- W2019958712 hasConcept C94263209 @default.
- W2019958712 hasConceptScore W2019958712C127162648 @default.
- W2019958712 hasConceptScore W2019958712C134406635 @default.
- W2019958712 hasConceptScore W2019958712C171250308 @default.
- W2019958712 hasConceptScore W2019958712C191897082 @default.
- W2019958712 hasConceptScore W2019958712C192562407 @default.
- W2019958712 hasConceptScore W2019958712C204223013 @default.
- W2019958712 hasConceptScore W2019958712C2779227376 @default.
- W2019958712 hasConceptScore W2019958712C41008148 @default.
- W2019958712 hasConceptScore W2019958712C46362747 @default.
- W2019958712 hasConceptScore W2019958712C49040817 @default.
- W2019958712 hasConceptScore W2019958712C525849907 @default.
- W2019958712 hasConceptScore W2019958712C53524968 @default.
- W2019958712 hasConceptScore W2019958712C68043766 @default.
- W2019958712 hasConceptScore W2019958712C74214498 @default.
- W2019958712 hasConceptScore W2019958712C76155785 @default.
- W2019958712 hasConceptScore W2019958712C9390403 @default.
- W2019958712 hasConceptScore W2019958712C94263209 @default.
- W2019958712 hasLocation W20199587121 @default.
- W2019958712 hasOpenAccess W2019958712 @default.
- W2019958712 hasPrimaryLocation W20199587121 @default.
- W2019958712 hasRelatedWork W1967450315 @default.
- W2019958712 hasRelatedWork W1973500313 @default.
- W2019958712 hasRelatedWork W1976044969 @default.
- W2019958712 hasRelatedWork W1999981161 @default.
- W2019958712 hasRelatedWork W2006403989 @default.
- W2019958712 hasRelatedWork W2012210956 @default.
- W2019958712 hasRelatedWork W2040232211 @default.
- W2019958712 hasRelatedWork W2049445643 @default.
- W2019958712 hasRelatedWork W2355550186 @default.
- W2019958712 hasRelatedWork W1970879150 @default.
- W2019958712 isParatext "false" @default.
- W2019958712 isRetracted "false" @default.
- W2019958712 magId "2019958712" @default.
- W2019958712 workType "article" @default.